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About CEITEC

 

Nanocharacterisation

Head: Prof. RNDr. Josef Humlíček, CSc.

Main Activity

Characterisation of surfaces and nanostructures by various analytical methods. Also includes komplex facilities for in-situ investigation of the processes responsible for the growth of thin films and self-assembling nanostructures.

Unique Features

Clean room laboratory (class 1 000 – 100 000) equipped with state-of-the-art techniques for characterisation of nanostructures allows effective control and analysis of all types of nano- and microstructures and devices. Together with the Nanolitography and Nanofabrication Core Facility, it offers a unique combination of techniques enabling both the fabrication of complex functional nanostructures and nanodevices and provides for their diagnostics.

Key equipment (Core Facility fully operational from 2014)

  • XPS
  • SIMS
  • SEM
  • SNOM
  • TERS + Micro-Raman
  • Vacuum FTIR
  • NIR/VIS/UV/(VUV) spectrometers and ellipsometers
  • Powder XRD diff ractometer
  • Low temperature (He) electrical and magnetic transport measurement system
  • Semiconductor characterisation system
  • Electronic measurement components
  • Complex UHV equipment for in-situ deposition and in-situ analysis (MBE, STM, nano-SAM)
  • PLD deposition system: UHV, in-situ RHEED, IR laser rating
  • Experimental PECVD system
  • Scanning electron microscope with focused ion beam and 4 nanomanipulators
  • Scanning probe microscopy for fabrication of nanostructures