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About CEITEC

 

Nanolithography and Nanofabrication

Head: Prof. RNDr. Tomáš Šikola, CSc.

Main Activity

Fabrication of nanostructures by lithographic methods (top-down approach) and by self-assembly methods (bottom-up approach). All necessary technological steps for the fabrication of functional nanodevices (design, lithography, metallization, sputtering, packaging, testing) will be available to the Core Facility users. Advanced methods for the guided growth (self-assembly) of the nanostructures will also be at their disposal and connection with classical lithography techniques will be possible.

Unique Features

Clean room laboratory (class 100 – 1 000) equipped with state-of-the-art techniques for the nanofabrication of nanostructures allows an effective fabrication of all kinds of nano- and microstructures and devices in one facility. Together with the Nanocharacterisation Core Facility it offers a unique combination of
techniques enabling both the fabrication of complex functional nanostructures and nanodevices and provides their diagnostics.

Key Equipment (Core Facility fully operational from 2014)

  • E-beam lithography system
  • UV maskless lithography system
  • DUV mask aligner with nanoimprint lithography option
  • Automatic coating and developing system
  • Wet benches for manual coating and developing
  • Microscope
  • Reflectometer
  • Mechanical profilometer
  • LPCVD & PECVD
  • MOCVD (MOVPE)
  • Wet benches for chemical processes
  • RIE resist stripper
  • DRIE in r.f. ICP (fluorine)
  • RIE in r.f. ICP (chlorine)
  • IBE, RIBE, IBS, IBAD incl. mass spectrometer
  • MBE
  • ALD
  • PECVD + RIE, 400°C, movable electrode
  • PECVD – ICP, 400°C
  • E-beam evaporator
  • Magnetron sputtering system, 2 chambers 6DC 4RF magnetrons
  • Wafer wire bonding and contacting
  • Laser trimming/dicing of Si and ceramic substrates
  • Testing environmental chamber
  • Probe station
  • Licences of COVENTOR software for MEMS design
  • Licences of CADENCE software for design and simulation of  integrated circuits