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Development of Methods for Analysis and Measuring

Mgr. Petr Klapetek, Ph.D.
Research Group Leader

THEMATIC RESEARCH FOCUS

RESEARCH AREAS

  • Quantitative scanning probe microscopy
  • Metrology
  • Numerical methods in nanoscale metrology

MAIN OBJECTIVES

Research and development of analytical and measurement methods

Development of the techniques and methodologies for microscopy, analysis and metrology of nanomaterials/nanostructures, and for diagnostics of their properties – new techniques of nanometrology by SPM, optical methods, combination of more techniques (SEM, AFM, etc.).

CONTENT OF RESEARCH

Research and development of instruments and methods for the investigation of nanomaterials and nanostructures

Development of methods and methodologies for the analysis and metrology of nanomaterials, nanostructures, for measuring their properties and the development of new analytical/diagnostic equipment and components. Testing manufacturing results of other CEITEC research groups. To surpass the limits of individual methods and the ambiguities of their results on the local characterisation of individual nanoobjects the combinations of more analytical techniques and procedures will be tested as well (e.g. SEM and SPM).

Development of SPM for application in nanometrology

Development of SPM methodology for application in nanometrology focusing on combination of different physical quantities determination and numerical modeling, including advanced scanning probe microscopy methods (scanning thermal microscopy, scanning near fi eld optical microscopy, etc.).

Development of scanning probe microscope (SPM) attached to a combined 3D optical interferometer. The key element of the equipment will be an unique instrument – nano-positioning and measuring machine for measuring and positioning with accuracy in the order of a tenth of nm (using a laser interferometer). The instruments will be used for providing new standards in nanometrology.

KEY RESEARCH EQUIPMENT

PLANNED RESEARCH INFRASTRUCTURE

Core Facilities

The research group will be one of the principal users of the equipment available within CEITEC Nanolithography and Nanofabrication and Nanocharacterisation Core Facilities.

Technology Units

Metrology

CURRENT RESEARCH INFRASTRUCTURE

The methods of scanning probe microscopy (AFM, STM, MFM, EFM, SThM, NSOM) for commercial and custom devices.

Numerical simulation of distributed computing systems and supercomputers consisting of graphics cards.

MAIN PROJECTS

  • Deposition of thermomechanically stable nanostructured diamond-like thin fi lms in dual frequency capacitive discharges (GA202/07/1669), Czech Science Foundation, 2007-2011, V. Buršikova, Masaryk University, P. Klapetek, Czech Metrology Institute, V. Peřina, Nuclear Physics Institute AS CR, J. Sobota, Institute of Scientific Instruments AS CR.
  • Analysis of the optical properties of solar cells (FT-TA3/142), Ministry of Industry and Trade, 2006-2009, A. Poruba, Solartec, Ltd., P. Klapetek, Czech Metrology Institute, I. Ohlidal, Masaryk University, M. Ohlidal, Brno University of Technology.
  • Nanometrology using methods of scanning probe microscopy (KAN311610701), Academy of Sciences of the Czech Republic, 2007-2011, P. Klapetek, Czech Metrology Institute, J. Lazar, Institute of Scientifi c Instruments AS CR, V. Buršikova, Masaryk University.

SELECTED PUBLICATIONS

  • KLAPETEK, P., NECAS, D., CAMPBELLOVA, A., YACOOT, A., KOENDERS, L. Methods for determining and processing 3D errors and uncertainties for AFM data analysis. Meas. Sci. Technol. 2011, 22(2), p. 25501.
  • KLAPETEK, P., VALTR, M. Near-fi eld optical microscopy simulations using graphics processing units. Surface and Interface Analysis. 2010, 42(6), p. 1109-1113.
  • KLAPETEK, P., OHLIDAL, I., BURSIK, J. Applications of scanning thermal microscopy in the analysis of the geometry of patterned structures. Surface and Interface Analysis. 2006, 38(4), p. 383-387.
  • KLAPETEK, P., OHLIDAL, I., BILEK, J. Infl uence of the atomic force microscope tip on the multifractal analysis of rough surfaces. Ultramicroscopy. 2004, 102(1), p. 51-59.
  • KLAPETEK, P., OHLIDAL, I. Theoretical analysis of the atomic force microscopy characterization of columnar thin fi lms. Ultramicroscopy. 2003, 94(1), p. 19-29.