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MECHANICAL PROPERTIES OF ULTRANANOCRYSTALLINE THIN FILMS DEPOSITED USING DUAL FREQUENCY DISCHARGES

CHEMICKE LISTY

Bursikova, V; Blahova, O; Karaskova, M; Zajickova, L; Jasek, O; Franta, D; Klapetek, P; Bursik, J, 2011: MECHANICAL PROPERTIES OF ULTRANANOCRYSTALLINE THIN FILMS DEPOSITED USING DUAL FREQUENCY DISCHARGES. CHEMICKE LISTY 105, p. S98 - S101

Research Groups:

• Development of Methods for Analysis and Measuring

CEITEC authors:

• Petr Klapetek, Ph.D.