Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films

DIAMOND AND RELATED MATERIALS

Ohlidal, M; Ohlidal, I; Klapetek, P; Necas, D; Bursikova, V, 2009: Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films. DIAMOND AND RELATED MATERIALS 18(2-3), p. 384 - 387

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