Deposition of Functional Plasma Polymers Influenced by Reactor Geometry in Capacitively Coupled Discharges

PLASMA PROCESSES AND POLYMERS

Hegemann, D; Michlicek, M; Blanchard, NE; Schutz, U; Lohmann, D; Vandenbossche, M; Zajickova, L; Drabik, M, 2016: Deposition of Functional Plasma Polymers Influenced by Reactor Geometry in Capacitively Coupled Discharges. PLASMA PROCESSES AND POLYMERS 13(2), p. 279 - 286, doi: 10.1002/ppap.201500078

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