Design and Fabrication of MEMS Low Power Heating Membrane

ElectroScope - http://www.electroscope.zcu.cz.

SVATOS, V.; MARIK, M.; PEKAREK, J.; SLAVIK, J.; CHOMOUCKA, J.; HUBALEK, J.,, 2012: Design and Fabrication of MEMS Low Power Heating Membrane. ELECTROSCOPE - HTTP://WWW.ELECTROSCOPE.ZCU.CZ. 2012(VI), p. 1 - 3

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