Effect of deposition angle on fabrication of plasmonic gold nanocones and nanodiscs

Microelectronic Engineering

Liška, J.; Ligmajer, F.; Pinho N. P. V.; Kejík, L.; Kvapil, M.; Dvořák, P.; Horký, M.; Leitner, N. S.; Reimhult, E.; Šikola, T., 2020: Effect of deposition angle on fabrication of plasmonic gold nanocones and nanodiscs. MICROELECTRONIC ENGINEERING 228, p. 111326-1 - 111326-6, doi: 10.1016/j.mee.2020.111326
(LYRA, MIRA, EVAPORATOR, RIE-FLUORINE, ICON-SPM)

Equipment:

Research Groups:

CEITEC authors: