Fabrication of Nanostructures and Nanodevices for Nanoelectronics and Spintronics
Ph.D. Thesis
Lišková, Z., 2015: Fabrication of Nanostructures and Nanodevices for Nanoelectronics and Spintronics. PH.D. THESIS , p. 1 - 106
(MIRA-EBL, DIENER, NANOCALC, DWL, EVAPORATOR, WIRE-BONDER, ALD, LYRA)
Equipment:
- Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS
- Resist stripper Diener electronic NANO Plasma cleaner
- Spectroscopic reflectometer Ocean Optics NanoCalc 2000
- UV Direct Write Laser system Heidelberg Instruments DWL 66-fs
- Electron beam evaporator BESTEC
- Wire bonder TPT HB 16
- Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200
- Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3
Research Groups: