Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)


Guarantor: Tomáš Šamořil, Ph.D.
Technology / Methodology: Probe microscopy & Nanomanipulation
Instrument status: Some Issues Some Issues, 6.11.2020 16:20, EDS detector out of orded.
Equipment placement: CEITEC Nano - C1.24
Research group: CF: CEITEC Nano

Detailed description:

SEM/FIB is a type of microscope where a focused electron/ion beam is scanned over the sample to generate an image of the surface or to modify it with nanometric resolution (usually better than 10 nm). The image is formed by detecting secondary and backscattered electrons emitted from the impact place of particle beam. The Gas Injection System (GIS) provides a gas inlet for gaseous precursors, thus allowing deposition and enhanced or selective etching on the sample surface using advanced surface chemistry. The microscope is equipped with two closed loop nanomanipulators (optionally two more can be installed), which allows measurement of 2-probe or 4-probe current-voltage characteristics. The tool is equipped with Electron Dispersive X-Ray spectroscopy analyser (EDX) for elemental analysis. Applications include positive/negative lithography, sample imaging and modification, electrical measurements and basic chemical and elemental analysis.


  • Komarov, P.; Jech, D.; Tkachenko, S.; Slámečka, K.; Dvořák, K.; Čelko, L., 2021: Wetting Behavior of Wear-Resistant WC-Co-Cr Cermet Coatings Produced by HVOF: The Role of Chemical Composition and Surface Roughness. JOURNAL OF THERMAL SPRAY TECHNOLOGY , doi: 10.1007/s11666-020-01130-6
  • Gao, W.; Pumera, M., 2021: 3D Printed Nanocarbon Frameworks for Li-Ion Battery Cathodes. ADVANCED FUNCTIONAL MATERIALS , doi: 10.1002/adfm.202007285
  • Simunkova, H.; Lednický, T.; Whitehead, A.H.; Kalina, L.; Simunek, P.; Hubalek, J., 2021: Tantalum-based nanotube arrays via porous-alumina-assisted electrodeposition from ionic liquid: Formation and electrical characterization. APPLIED SURFACE SCIENCE 548, doi: 10.1016/j.apsusc.2021.149264
  • REMEŠOVÁ, M.; TKACHENKO, S.; KVARDA, D.; ROČŇÁKOVÁ, I.; GOLLAS, B.; MENELAOU, M.; ČELKO, L.; KAISER, J, 2020: Effects of anodizing conditions and the addition of Al2O3/PTFE particles on the microstructure and the mechanical properties of porous anodic coatings on the AA1050 aluminium alloy. APPLIED SURFACE SCIENCE , p. 1 - 10, doi: 10.1016/j.apsusc.2020.145780; FULL TEXT
  • Knapek, A; Dallaev, R; Burda, D; Sobola, D; Allaham, MM; Horacek, M; Kaspar, P; Matejka, M; Mousa, MS, 2020: Field Emission Properties of Polymer Graphite Tips Prepared by Membrane Electrochemical Etching. NANOMATERIALS 10(7), p. 1294-1 - 1294-12, doi: 10.3390/nano10071294

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