Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)


Guarantor: Tomáš Šamořil, Ph.D.
Technology / Methodology: Probe microscopy & Nanomanipulation
Instrument status: Operational Operational, 5.1.2020 20:47
Equipment placement: CEITEC Nano - C1.24
Research group: CF: CEITEC Nano

Detailed description:

SEM/FIB is a type of microscope where a focused electron/ion beam is scanned over the sample to generate an image of the surface or to modify it with nanometric resolution (usually better than 10 nm). The image is formed by detecting secondary and backscattered electrons emitted from the impact place of particle beam. The Gas Injection System (GIS) provides a gas inlet for gaseous precursors, thus allowing deposition and enhanced or selective etching on the sample surface using advanced surface chemistry. The microscope is equipped with two closed loop nanomanipulators (optionally two more can be installed), which allows measurement of 2-probe or 4-probe current-voltage characteristics. The tool is equipped with Electron Dispersive X-Ray spectroscopy analyser (EDX) for elemental analysis. Applications include positive/negative lithography, sample imaging and modification, electrical measurements and basic chemical and elemental analysis.


  • Mouralova, K.; Benes, L.; Bednar, J.; Zahradnicek, R.; Prokes, T.; Fiala, Z.; Fries, J., 2020: Precision Machining of Nimonic C 263 Super AlloyUsing WEDM. COATINGS 10(6), p. 590-1 - 590-20, doi: 10.3390/coatings10060590
  • Mouralova, K.; Prokes, T.; Benes, L., 2020: Analysis of the oxide occurrence on WEDM surfaces in relation to subsequent surface treatments. PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS, PART C: JOURNAL OF MECHANICAL ENGINEERING SCIENCE 234(3), p. 721 - 733, doi: 10.1177/0954406219884974
  • Sobola, D.; Ramazanov, S.; Koneĉnỳ, M.; Orudzhev, F.; Kaspar, P.; Papež, N.; Knápek, A.; Potoĉek, M., 2020: Complementary SEM-AFM of swelling Bi-Fe-O film on HOPG substrate. MATERIALS 13(10), p. 2402-1 - 2402-15, doi: 10.3390/ma13102402
  • Mouralova, K.; Zahradnicek, R.; Benes, L.; Prokes, T.; Hrdy, R.; Fries, J., 2020: Study of micro structural material changes after WEDM based on TEM lamella analysis. METALS 10(7), p. 949-1 - 949-17, doi: 10.3390/met10070949
  • Remešová, M.; Tkachenko, S.; Kvarda, D. ;Ročňáková, I.; Gollas, B.; Menelaou, M.; Čelko, L.; Kaiser, J., 2020: Effects of anodizing conditions and the addition of Al2O3/PTFE particles on the microstructure and the mechanical properties of porous anodic coatings on the AA1050 aluminium alloy. APPLIED SURFACE SCIENCE 513, p. 145780-1 - 145780-10, doi: 10.1016/j.apsusc.2020.145780

Show more publications...