Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3

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Technology / Methodology:
Probe microscopy & Nanomanipulation

Location:
CEITEC BUT

Research group:
CF: CEITEC Nano

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SEM/FIB is a type of microscope where a focused electron/ion beam is scanned over the sample to generate an image of the surface or to modify it with nanometric resolution (usually better than 10 nm). The image is formed by detecting secondary and backscattered electrons emitted from the impact place of particle beam. The Gas Injection System (GIS) provides a gas inlet for gaseous precursors, thus allowing deposition and enhanced or selective etching on the sample surface using advanced surface chemistry. The microscope is equipped with two closed loop nanomanipulators (optionally two more can be installed), which allows measurement of 2-probe or 4-probe current-voltage characteristics. The tool is equipped with Electron Dispersive X-Ray spectroscopy analyser (EDX) for elemental analysis. Applications include positive/negative lithography, sample imaging and modification, electrical measurements and basic chemical and elemental analysis.

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Publications:

• Mach, J; Prochazka, P; Bartosik, M; Nezval, D; Piastek, J; Hulva, J; Svarc, V; Konecny, M; Kormos, L; Sikola, T, 2017: Electronic transport properties of graphene doped by gallium. NANOTECHNOLOGY 28(41), doi: 10.1088/1361-6528/aa86a4 (DIENER, DWL, EVAPORATOR, WIRE-BONDER, LYRA)
• Babocky, J; Krizova, A; Strbkova, L; Kejik, L; Ligmajer, F; Hrton, M; Dvorak, P; Tyc, M; Collakova, J; Krapek, V; Kalousek, R; Chmelik, R; Sikola, T, 2017: Quantitative 3D Phase Imaging of Plasmonic Metasurfaces. ACS PHOTONICS 4(6), p. 1389 - 1397, doi: 10.1021/acsphotonics.7b00022 (MIRA, LYRA, EVAPORATOR)
• Dvorak, P; Edes, Z; Kvapil, M; Samoril, T; Ligmajer, F; Hrton, M; Kalousek, R; Krapek, V; Dub, P; Spousta, J; Varga, P; Sikola, T, 2017: Imaging of near-field interference patterns by aperture-type SNOM - influence of illumination wavelength and polarization state. OPTICS EXPRESS 25(14), p. 16560 - 16573, doi: 10.1364/OE.25.016560 (LYRA, EVAPORATOR, SNOM-NANONICS)
• Kormos, L; Kratzer, M; Kostecki, K; Oehme, M; Sikola, T; Kasper, E; Schulze, J; Teichert, C, 2017: Surface analysis of epitaxially grown GeSn alloys with Sn contents between 15% and 18%. SURFACE AND INTERFACE ANALYSIS 49(4), p. 297 - 302, doi: 10.1002/sia.6134 (LYRA)
• Drdlik, D; Drdlikova, K; Hadraba, H; Maca, K, 2017: Optical, mechanical and fractographic response of transparent alumina ceramics on erbium doping. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 37(14), p. 4265 - 4270, doi: 10.1016/j.jeurceramsoc.2017.02.043 (LYRA, TITAN)
• Drdlikova, K; Klement, R; Drdlik, D; Spusta, T; Galusek, D; Maca, K, 2017: Luminescent Er3+ doped transparent alumina ceramics. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 37(7), p. 2695 - 2703, doi: 10.1016/fleurceramsoc.2017.02.017 (LYRA)
• Kalousek, R; Spousta, J; Zlamal, J; Dub, P; Sikola, T; Shen, ZJ; Salamon, D; Maca, K, 2017: Rapid heating of zirconia nanoparticle-powder compacts by infrared radiation heat transfer. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 37(3), p. 1067 - 1072, doi: 10.1016/j.jeurceramsoc.2016.10.004 (LYRA)
• Maca, K; Pouchly, V; Drdlik, D; Hadraba, H; Chlup, Z, 2017: Dilatometric study of anisotropic sintering of alumina/zirconia laminates with controlled fracture behaviour. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 37(14), p. 4287 - 4295, doi: 10.1016/j.jeurceramsoc.2017.04.030 (LYRA)
• Drdlikova, K; Klement, R; Hadraba, H; Drdlik, D; Galusek, D; Maca, K, 2017: Luminescent Eu3+-doped transparent alumina ceramics with high hardness. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 37(14), p. 4271 - 4277, doi: 10.1016/j.jeurceramsoc.2017.05.007 (LYRA)
• Rolecek, J; Foral, S; Katovsky, K; Salamon, D, 2017: A feasibility study of using CeO2 as a surrogate material during the investigation of UO2 thermal conductivity enhancement. ADVANCES IN APPLIED CERAMICS 116(3), p. 123 - 131, doi: 10.1080/17436753.2016.1264122 (LYRA)
• Obrtlik, K; Celko, L; Chraska, T; Sulak, I; Gejdos, P, 2017: Effect of alumina-silica-zirconia eutectic ceramic thermal barrier coating on the low cycle fatigue behaviour of cast polycrystalline nickel-based superalloy at 900 degrees C. SURFACE & COATINGS TECHNOLOGY 318, p. 374 - 381, doi: 10.1016/j.surfcoat.2017.03.003 (LYRA)
• Mouralova, K; Kovar, J; Klakurkova, L; Prokes, T; Horynova, M, 2017: Comparison of morphology and topography of surfaces of WEDM machined structural materials. MEASUREMENT 104, p. 12 - 20, doi: 10.1016/j.measurement.2017.03.009 (LYRA)
• Casas Luna, M.; Montúfar, E. B.; Horynová, M.; Gejdoš, P.; Klakurková, L.; Díaz de la Torre, S.; Kaiser, J.; Čelko, L., 2017: Tricalcium Phosphate - Magnesium Interface: Microstructure and Properties. SOLID STATE PHENOMENA 258, p. 412 - 415, doi: 10.4028/www.scientific.net/SSP.258.412 (LYRA, RIGAKU3, micro-CT)
• Jiao, Z.; Michalicka, J.; Was, G.S., 2018: Self-ion emulation of high dose neutron irradiated microstructure in stainless steels. JOURNAL OF NUCLEAR MATERIALS 501, p. 312 - 318, doi: 10.1016/j.jnucmat.2018.01.054 (LYRA, HELIOS, TITAN)
• Arregi, J. A.; Horký, M.; Fabianová, K.; Tolley, R.; Fullerton, E. E.; Uhlíř, V., 2018: Magnetization reversal and confinement effects across the metamagnetic phase transition in mesoscale FeRh structures. JOURNAL OF PHYSICS D: APPLIED PHYSICS 51(10), p. 105001-1 - 105001-11, doi: 10.1088/1361-6463/aaaa5a (MIRA, LYRA, MAGNETRON)
• Hojna, A; Michalicka, J; Hadraba, H; Di Gabriele, F; Duchon, J; Rozumova, L; Husak, R, 2017: Fracture Resistance of 14Cr ODS Steel Exposed to a High Temperature Gas. METALS 7(12), p. 560-1 - 560-17, doi: 10.3390/met7120560 (LYRA, TITAN)
• Montufar, E.B.; Casas-Luna, M.; Horynová, M.; Tkachenko, S.; Fohlerová, Z.; Diaz-de-la-Torre, S.; Dvořák, K.; Čelko, L.; Kaiser, J., 2018: High strength, biodegradable and cytocompatible alpha tricalcium phosphate-iron composites for temporal reduction of bone fractures. ACTA BIOMATERIALIA (LYRA, RIGAKU3, micro-CT)
• Michalička, J.; Jiao, Z.; Was, G., 2017: Radiation-Induced Precipitates in a Self-ion Irradiated Cold-Worked 316 Austenitic Stainless Steel Used for PWR Baffle-Bolt. PROCEEDING OF TMS 18TH ENVIRONMENTAL DEGRADATION CONFERENCE OF MATERIALS IN NUCLEAR POWER SYSTEMS – WATER REACTORS 1, p. 565 - 580, doi: https://doi.org/10.1007/978-3-319-67244-1 (TITAN, LYRA, HELIOS)
• Bartosik, M; Kormos, L; Flajsman, L; Kalousek, R; Mach, J; Liskova, Z; Nezval, D; Svarc, V; Samoril, T; Sikola, T, 2017: Nanometer-Sized Water Bridge and Pull-Off Force in AFM at Different Relative Humidities: Reproducibility Measurement and Model Based on Surface Tension Change. JOURNAL OF PHYSICAL CHEMISTRY B 121(3), p. 610 - 619, doi: 10.1021/acs.jpcb.6b11108 (LYRA)
• Casas-Luna, M; Tkachenko, S; Horynova, M; Klakurkova, L; Gejdos, P; Diaz-de-la-Torre, S; Celko, L; Kaiser, J; Montufar, EB, 2017: Interpenetrated Magnesium-Tricalcium Phosphate Composite: Manufacture, Characterization and In Vitro Degradation Test. ACTA METALLURGICA SINICA-ENGLISH LETTERS 30(4), p. 319 - 325, doi: 10.1007/s40195-017-0560-0 (LYRA, RIGAKU3)
• Hadraba, H.; Husak, R.; Stratil, L.; Siska, F.; Chlup, Z.; Puchy, V.; Michalicka, J., 2017: Survey of oxide candidate for advanced 9%, 14% and 17%Cr ODS steels for fusion applications. FUSION ENGINEERING AND DESIGN 124, p. 1028 - 1032, doi: https://doi.org/10.1016/j.fusengdes.2017.04.048 (TITAN, LYRA)
• Sopha, H; Samoril, T; Palesch, E; Hromadko, L; Zazpe, R; Skoda, D; Urbanek, M; Ng, S; Prikryl, J; Macak, JM, 2017: Ideally Hexagonally Ordered TiO2 Nanotube Arrays. CHEMISTRYOPEN 6(4), p. 480 - 483, doi: 10.1002/open.201700108 (LYRA, ICON-SPM)
• Manakhov, A; Kedronova, E; Medalova, J; Cernochova, P; Obrusnik, A; Michlicek, M; Shtansky, DV; Zajickova, L, 2017: Carboxyl-anhydride and amine plasma coating of PCL nanofibers to improve their bioactivity. MATERIALS & DESIGN 132, p. 257 - 265, doi: 10.1016/j.matdes.2017.06.057 (LYRA, KRATOS-XPS)
• Manakhov, A; Landova, M; Medalova, J; Michlicek, M; Polcak, J; Necas, D; Zajickova, L, 2017: Cyclopropylamine plasma polymers for increased cell adhesion and growth. PLASMA PROCESSES AND POLYMERS 14(7), doi: 10.1002/ppap.201600123 (LYRA, ICON-SPM, DEKTAK)
• Hrubý, J., 2017: Preparation and Characterization of Graphene Based Hybrid Materials. MASTER´S THESIS , p. 1 - 91 (TERS, LYRA)
• Krajňák, T., 2017: Analysis of Localy Modified Surfaces for Selective Growth of Cobalt. BACHELOR´S THESIS , p. 1 - 42 (KRATOS-XPS, LYRA)
• Jaskowiec, J., 2017: Magnetic Force Microscopy and Transport Properties of Metamagnetic Nanostructures. BACHELOR´S THESIS , p. 1 - 47 (MAGNETRON, MIRA, RAITH, ICON-SPM, CRYOGENIC, LYRA)
• Vaňatka, M., 2017: Fabrication and characterization of nanostructures with functional properties in the field of spintronics. TREATISE TO STATE DOCTORAL EXAM , p. 1 - 31 (TITAN, MIRA, EVAPORATOR, MAGNETRON, WIRE-BONDER, LYRA)
• Balíček, M., 2018: Analysis Of Wear On Cutting Edges During Turning Of Main Steels. MASTER´S THESIS , p. 1 - 83 (LYRA)
• Robl, J., 2018: Use Of Additive Technology For The Production Concept Of Turbocharger Components. BACHELOR´S THESIS , p. 1 - 66 (LYRA, HELIOS, TITAN)
• Urbánek, M.; Flajšman, L.; Křižáková, V.; Gloss, J.; Horký, M.; Schmid, M.; Varga, P., 2018: Research Update: Focused ion beam direct writing of magnetic patterns with controlled structural and magnetic properties. APL MATERIALS 6(6), p. 060701-1 - 060701-7, doi: 10.1063/1.5029367 (LYRA, HELIOS, UHV-XPS, UHV-PREPARATION, UHV-DEPOSITION, ICON-SPM, RIGAKU9)
• Bělka, M., 2018: In vitro study of the effect of particle characteristics and flow rate on regional deposition in human airways. PH.D. THESIS , p. 1 - 121 (LYRA)
• Rudolfová, Z., 2018: Creation of nanostructures on surfaces of solid matter using hybrid methods. PH.D. THESIS , p. 1 - 75 (LYRA)
• Jemelka, M., 2017: Microstructure Revealing and Analysis of Partially Sintered Oxide Ceramic Materials. BACHELOR´S THESIS , p. 1 - 52 (LYRA)
• Hegrová, V., 2017: Fabrication and application of graphene-metal heterostructures in biosensing by surface enhanced Raman spectroscopy. BACHELOR´S THESIS , p. 1 - 37 (TERS, LYRA, ICON-SPM)
• Drdlik, D; Slama, M; Hadraba, H; Drdlikova, K; Cihlar, J, 2016: On the role of the indifferent electrolyte LiCl in electrophoretic deposition of hydroxyapatite from 2-propanol dispersions. CERAMICS INTERNATIONAL 42(15), p. 16529 - 16534, doi: 10.1016/j.ceramint.2016.07.071 (LYRA)
• Horký, M., 2016: Growth of Metastable FCC FE Thin Films on Cu(100)/Si(100) Substrates. MASTER´S THESIS , p. 1 - 96 (UHV-PREPARATION, UHV-XPS, UHV-SPM, ICON-SPM, LYRA, VERIOS, UHV-LEIS, KRATOS-XPS, RIGAKU3)
• Musálek, T., 2016: Semiconductor nanowire growth utilizing alloyed catalyst. MASTER’S THESIS , p. 1 - 52 (UHV-MBE, VERIOS, LYRA, MIRA, ALD)
• Andrýsek, M., 2016: Preparation of surfaces with diffusion barrier for studying initial phase of semiconductor nanowire growth. BACHELOR’S THESIS , p. 1 - 22 (LYRA, VERIOS, ALD, TERS)
• Fabianová, K., 2016: Fabrication of well defined nanoporous structures with application in membrane sensing. BACHELOR’S THESIS , p. 1 - 54 (PECVD, MIRA, LYRA, RIE-FLUORINE, NANOCALC, MAGNETRON, EVAPORATOR)
• Manakhov, A; Michlicek, M; Necas, D; Polcak, J; Makhneva, E; Elias, M; Zajickova, L, 2016: Carboxyl-rich coatings deposited by atmospheric plasma co-polymerization of maleic anhydride and acetylene. SURFACE & COATINGS TECHNOLOGY 295, p. 37 - 45, doi: 10.1016/j.surfcoat.2015.11.039 (FTIR, ICON-SPM, LYRA, MAGNETRON)
• Matejicek, J; Vilemova, M; Hadraba, H; Di Gabriele, F; Kubena, I; Kolibalova, E; Michalicka, J; Cech, J; Jager, A, 2016: Behavior of W-based materials in hot helium gas. NUCLEAR MATERIALS AND ENERGY 9, p. 405 - 410, doi: 10.1016/j.nme.2016.03.009 (LYRA)
• Montufar, EB; Horynova, M; Casas-Luna, M; Diaz-De-La-Torre, S; Celko, L; Klakurkova, L; Spotz, Z; Dieguez-Trejo, G; Fohlerova, Z; Dvorak, K; Zikmund, T; Kaiser, J, 2016: Spark Plasma Sintering of Load-Bearing Iron-Carbon Nanotube-Tricalcium Phosphate CerMets for Orthopaedic Applications. JOM 68(4), p. 1134 - 1142, doi: 10.1007/s11837-015-1806-9 (LYRA, RIGAKU3)
• Mouralova, K; Matousek, R; Kovar, J; Mach, J; Klakurkova, L; Bednar, J, 2016: Analyzing the surface layer after WEDM depending on the parameters of a machine for the 16MnCr5 steel. MEASUREMENT 94, p. 771 - 779, doi: 10.1016/j.measurement.2016.09.028 (LYRA)
• Kvapil, M., 2015: Plasmonic Antennas. PH.D. THESIS , p. 1 - 104 (FTIR, NANOCALC, LYRA, TERS, DIENER)
• Duda, R., 2015: Analysis of Nanostructures by TOF-LEIS. PH.D. THESIS , p. 1 - 91 (LYRA)
• Šamořil, T., 2015: Application of the focused ion and electron beam in nanotechnologies. PH.D. THESIS , p. 1 - 126 (LYRA, FTIR)
• Mouralová, K., 2015: Modern technologies in wire electrical discharge machining the metal alloys. PH.D. THESIS , p. 1 - 98 (LYRA)
• Lišková, Z., 2015: Fabrication of Nanostructures and Nanodevices for Nanoelectronics and Spintronics. PH.D. THESIS , p. 1 - 106 (LYRA, MIRA, DIENER, NANOCALC, DWL, EVAPORATOR, WIRE-BONDER, ALD)
• Břínek, L., 2015: Application of Plasmon Polaritons in Nanophotonics. PH.D. THESIS , p. 1 - 75 (FTIR, LYRA, MIRA, TERS)
• Švarc, V., 2015: Shielding effect of oxide isolating layer on surface potential measured by Kelvin probe force microscopy. MASTER´S THESIS , p. 1 - 50 (LYRA, ALD, DIENER, WIRE-BONDER)
• Kormoš, L., 2015: Application of Graphene Membrane in Nanoelectronic Devices. MASTER´S THESIS , p. 1 - 59 (LYRA, DIENER, WIRE-BONDER)
• Knotek, M., 2015: Selective growth of GaN nanostructures on silicon substrates. MASTER´S THESIS , p. 1 - 68 (DEKTAK, LYRA, ICON-SPM, TERS)
• Urbanek, M; Uhlir, V; Lambert, CH; Kan, JJ; Eibagi, N; Vanatka, M; Flajsman, L; Kalousek, R; Im, MY; Fischer, P; Sikola, T; Fullerton, EE, 2015: Dynamics and efficiency of magnetic vortex circulation reversal. PHYSICAL REVIEW B 91(9), doi: 10.1103/PhysRevB.91.094415 (MIRA, LYRA, WIRE-BONDER)
• Křižáková, V., 2018: Spin wave excitation and propagation in magnonic crystals prepared by focused ion beam direct writing. MASTER´S THESIS , p. 1 - 83 (LYRA, HELIOS, ICON-SPM, MIRA, EVAPORATOR, WIRE-BONDER)
• Gloss, J.; Horký, M.; Křižáková, V.; Flajšman, L.; Schmid, M.; Urbánek, M.; Varga, P., 2019: The growth of metastable fcc Fe78Ni22 thin films on H-Si (100) substrates suitable for focused ion beam direct magnetic patterning. APPLIED SURFACE SCIENCE 469, p. 747 - 752, doi: 10.1016/j.apsusc.2018.10.263 (LYRA, UHV-XPS, UHV-PREPARATION, UHV-DEPOSITION, ICON-SPM)
• Dvořák, P., 2018: Nanophotonics. PH.D. THESIS , p. 1 - 134 (SNOM-NANONICS, LYRA, TERS, EVAPORATOR, FTIR, WOOLLAM-VIS)
• Dvořák, P.; Kvapil, M.; Bouchal, P.; Édes, Z.; Šamořil, T.; Hrtoň, M.; Ligmajer, F.; Křápek, V.; Šikola, T., 2018: Near-field digital holography: a tool for plasmon phase imaging. NANOSCALE 10(45), p. 21363 - 21368, doi: 10.1039/C8NR07438K (SNOM-NANONICS, LYRA)
• Motyčková, L., 2018: Epitaxial growth and characterization of metamagnetic nanoparticles for biomedical applications. BACHELOR´S THESIS , p. 1 - 55 (MAGNETRON, ICON-SPM, LYRA, CRYOGENIC)
• Mouralova, K; Kovar, J; Klakurkova, L; Prokes, T, 2018: Effect of Width of Kerf on Machining Accuracy and Subsurface Layer After WEDM. JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE 27(4), p. 1908 - 1916, doi: 10.1007/s11665-018-3239-4 (LYRA)
• Mouralova, K.; Benes, L.; Zahradnicek, R.; Bednar, J.; Hrabec, P.; Prokes, T.; Matousek, R.; Fiala, Z., 2018: Quality of surface and subsurface layers after WEDM aluminum alloy 7475-T7351 including analysis of TEM lamella. THE INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY 99(9-12), p. 2309 - 2326, doi: 10.1007/s00170-018-2626-1 (LYRA, ICON-SPM, HELIOS, TITAN, RIGAKU9)
• Brinek, L; Kvapil, M; Samoril, T; Hrton, M; Kalousek, R; Krapek, V; Spousta, J; Dub, P; Varga, P; Sikola, T, 2018: Plasmon Resonances of Mid-IR Antennas on Absorbing Substrate: Optimization of Localized Plasmon-Enhanced Absorption upon Strong Coupling Effect. ACS PHOTONICS 5(11), p. 4378 - 4385, doi: 10.1021/acsphotonics.8b00806 (LYRA, FTIR)
• Prajzler, V; Salamon, D; Maca, K, 2018: Pressure-less rapid rate sintering of pre-sintered alumina and zirconia ceramics. CERAMICS INTERNATIONAL 44(9), p. 10840 - 10846, doi: 10.1016/j.ceramint.2018.03.132 (LYRA)