Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)

Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3

Guarantor: Tomáš Šamořil, Ph.D.
Technology / Methodology: Probe microscopy & Nanomanipulation
Instrument status: Some Issues Some Issues, 19.8.2019 16:03, The FIB was temporarily uninstalled.
Equipment placement: CEITEC Nano - C1.24
Research group: CF: CEITEC Nano
Upcoming trainings: 1.8. 15:00 - 16:30: LYRA SEM advanced (EDX) training - Max 4 attendees, we will meet in the LYRA lab

Detailed description:

SEM/FIB is a type of microscope where a focused electron/ion beam is scanned over the sample to generate an image of the surface or to modify it with nanometric resolution (usually better than 10 nm). The image is formed by detecting secondary and backscattered electrons emitted from the impact place of particle beam. The Gas Injection System (GIS) provides a gas inlet for gaseous precursors, thus allowing deposition and enhanced or selective etching on the sample surface using advanced surface chemistry. The microscope is equipped with two closed loop nanomanipulators (optionally two more can be installed), which allows measurement of 2-probe or 4-probe current-voltage characteristics. The tool is equipped with Electron Dispersive X-Ray spectroscopy analyser (EDX) for elemental analysis. Applications include positive/negative lithography, sample imaging and modification, electrical measurements and basic chemical and elemental analysis.


  • Gloss, J.; Horký, M.; Křižáková, V.; Flajšman, L.; Schmid, M.; Urbánek, M.; Varga, P., 2019: The growth of metastable fcc Fe78Ni22 thin films on H-Si (100) substrates suitable for focused ion beam direct magnetic patterning. APPLIED SURFACE SCIENCE 469, p. 747 - 752, doi: 10.1016/j.apsusc.2018.10.263
  • Horák, M.; Křápek, V.; Hrtoň, M.; Konečná, A.; Ligmajer, F.; Stöger-Pollach, M.; Šamořil, T.; Paták, A.; Édes, Z.; Metelka, O.; Babocký, J.; Šikola, T., 2019: Limits of Babinet’s principle for solid and hollow plasmonic antennas. SCIENTIFIC REPORTS 9(1), p. 4004-1 - 4004-11, doi: 10.1038/s41598-019-40500-1
  • Stöger-Pollach, M.; Bukvišová, K.; Schwarz, S.; Kvapil, M.; Šamořil, T.; Horák, M., 2019: Fundamentals of cathodoluminescence in a STEM: The impact of sample geometry and electron beam energy on light emission of semiconductors. ULTRAMICROSCOPY 200, p. 111 - 124, doi: 10.1016/j.ultramic.2019.03.001
  • Rolecek, J; Pejchalova, L; Martinez-Vazquez, FJ; Gonzalez, PM; Salamon, D, 2019: Bioceramic scaffolds fabrication: Indirect 3D printing combined with ice-templating vs. robocasting. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 39(4), p. 1595 - 1602, doi: 10.1016/j.jeurceramsoc.2018.12.006
  • Michlíček, M.; Manakhov, A.; Dvořáková, E.; Zajíčková, L., 2019: Homogeneity and penetration depth of atmospheric pressure plasma polymerization onto electrospun nanofibrous mats. APPLIED SURFACE SCIENCE 471, p. 835 - 841, doi: 10.1016/j.apsusc.2018.11.148

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