Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)

Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3

Guarantor: Tomáš Šamořil, Ph.D.
Technology / Methodology: Probe microscopy & Nanomanipulation
Instrument status: Some Issues Some Issues, 2.12.2019 18:11, Problem with SEM cathode (low emission current and worse resolution). Use HV 20 kV or lower.
Equipment placement: CEITEC Nano - C1.24
Research group: CF: CEITEC Nano

Detailed description:

SEM/FIB is a type of microscope where a focused electron/ion beam is scanned over the sample to generate an image of the surface or to modify it with nanometric resolution (usually better than 10 nm). The image is formed by detecting secondary and backscattered electrons emitted from the impact place of particle beam. The Gas Injection System (GIS) provides a gas inlet for gaseous precursors, thus allowing deposition and enhanced or selective etching on the sample surface using advanced surface chemistry. The microscope is equipped with two closed loop nanomanipulators (optionally two more can be installed), which allows measurement of 2-probe or 4-probe current-voltage characteristics. The tool is equipped with Electron Dispersive X-Ray spectroscopy analyser (EDX) for elemental analysis. Applications include positive/negative lithography, sample imaging and modification, electrical measurements and basic chemical and elemental analysis.


  • Rolecek, J; Pejchalova, L; Martinez-Vazquez, FJ; Gonzalez, PM; Salamon, D, 2019: Bioceramic scaffolds fabrication: Indirect 3D printing combined with ice-templating vs. robocasting. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 39(4), p. 1595 - 1602, doi: 10.1016/j.jeurceramsoc.2018.12.006
  • Michlíček, M.; Manakhov, A.; Dvořáková, E.; Zajíčková, L., 2019: Homogeneity and penetration depth of atmospheric pressure plasma polymerization onto electrospun nanofibrous mats. APPLIED SURFACE SCIENCE 471, p. 835 - 841, doi: 10.1016/j.apsusc.2018.11.148
  • Mouralova, K.; Prokes, T.; Benes, L., 2019: Surface and Subsurface Layers Defects Analysis After WEDM Affecting the Subsequent Lifetime of Produced Components. ARABIAN JOURNAL FOR SCIENCE AND ENGINEERING 44(9), p. 7723 - 7735, doi: 10.1007/s13369-019-03887-7
  • Vacek, P.; Kostelník, P.; Gröger, R., 2019: Correlation of Structure and EBIC Contrast from Threading Dislocations in AlN/Si Films. PHYSICA STATUS SOLIDI B , p. 1900279-1 - 1900279-7, doi: 10.1002/pssb.201900279
  • Fecko, P., 2019: Gecko mimicking surfaces. MASTER´S THESIS , p. 1 - 52

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