CURRENT RESEARCH INFRASTRUCTURE
Clean room facility (class 100–1000, 120 m2) for semiconductor technologies (≈ 3 μm) – preferentially for education purposes; optical spectroscopy (transmission, reflection and ellipsometry) in a wide spectral region (FIR – UV) including thermal dependences; in situ ellipsometry at high temperatures; transport properties measurements (conductance and Hall effect, life-time determination of carriers from photoconductivity); SPM microscopy.
New equipment (belonging to CEITEC in core facilities)
Infrared spectroscopy and spectro-microscopy: Bruker Vertex 80v spectrometer (spectral resolution 0.2 cm-1, spectral range 20-15 000 cm-1, transmission, reflection at 10 deg); Bruker Hyperion 3000 infrared microscope (single element MCT detector, spectral range 600-6000 cm-1, array MCT detector 128×128 pixels, spectral range 800-4000 cm-1, objectives for reflection and transmission 15x, 36x, ATR, grazing incidence).
Spectroscopic ellipsometry: Woollam VASE NIR-UV ellipsometer (spectral range 193-2500 nm, rotating compensator, microfocus 100 and 200 micrometers); Woollam IR-VASE MIR ellipsometer (spectral range 1.7 to 30 micrometers, rotating compensator).
List of available equipment can be found HERE.