Liquid assisted plasma enhanced chemical vapour deposition with a non-thermal plasma jet at atmospheric pressure

THIN SOLID FILMS

Schafer, J; Fricke, K; Mika, F; Pokorna, Z; Zajickova, L; Foest, R, 2017: Liquid assisted plasma enhanced chemical vapour deposition with a non-thermal plasma jet at atmospheric pressure. THIN SOLID FILMS 630, p. 71 - 78, doi: 10.1016/j.tsf.2016.09.022

Výzkumné skupiny:

Plazmové technologie

CEITEC autoři:

doc. Mgr. Lenka Zajíčková, Ph.D.