Low power MEMS heating membrane

EDS 12 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS

SVATOS, V.; MARIK, M.; PEKAREK, J.; HRDY, R.; CHOMOUCKA, J.; HUBALEK, J.,, 2012: Low power MEMS heating membrane. EDS 12 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS , p. 257 - 260

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