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Measurement of the thickness distribution and optical constants of non-uniform thin films

MEASUREMENT SCIENCE & TECHNOLOGY

Ohlidal, M; Ohlidal, I; Klapetek, P; Necas, D; Majumdar, A, 2011: Measurement of the thickness distribution and optical constants of non-uniform thin films. MEASUREMENT SCIENCE & TECHNOLOGY 22(8), doi: 10.1088/0957-0233/22/8/085104

Research Groups:

• Development of Methods for Analysis and Measuring

CEITEC authors:

• David Nečas, Ph.D.
• Petr Klapetek, Ph.D.