Optimization of ion-atomic beam source for deposition of GaN ultrathin films
REVIEW OF SCIENTIFIC INSTRUMENTS
MACH, J.; ŠAMOŘIL, T.; KOLÍBAL, M.; ZLÁMAL, J.; VOBORNÝ, S.; BARTOŠÍK, M.; ŠIKOLA, T., 2014: Optimization of ion-atomic beam source for deposition of GaN ultrathin films. REVIEW OF SCIENTIFIC INSTRUMENTS 85(8), p. 083302-1 - 5, doi: 10.1063/1.4892800; FULL TEXT
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