Assessment of non-uniform thin films using spectroscopic ellipsometry and imaging spectroscopic reflectometry

THIN SOLID FILMS

Necas, D; Ohlidal, I; Franta, D; Cudek, V; Ohlidal, M; Vodak, J; Sladkova, L; Zajickova, L; Elias, M; Vizd´a, F, 2014: Assessment of non-uniform thin films using spectroscopic ellipsometry and imaging spectroscopic reflectometry. THIN SOLID FILMS 571, p. 573 - 578, doi: 10.1016/j.tsf.2013.12.036

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