Share
Deposition of Functional Plasma Polymers Influenced by Reactor Geometry in Capacitively Coupled Discharges
PLASMA PROCESSES AND POLYMERS
Hegemann, D; Michlicek, M; Blanchard, NE; Schutz, U; Lohmann, D; Vandenbossche, M; Zajickova, L; Drabik, M, 2016: Deposition of Functional Plasma Polymers Influenced by Reactor Geometry in Capacitively Coupled Discharges. PLASMA PROCESSES AND POLYMERS 13(2), p. 279 - 286, doi: 10.1002/ppap.201500078
CEITEC authors: