Electron beam directed etching of hexagonal boron nitride

NANOSCALE

ELBADAWI, C.; TRAN, T.; KOLÍBAL, M.; ŠIKOLA, T.; SCOTT, J.; CAI, Q.; LI, L.; TANIGUCHI, T.; WATANABE, K.; TOTH, M.; AHARONOVICH, I.; LOBO, C., 2016: Electron beam directed etching of hexagonal boron nitride. NANOSCALE 8(36), p. 16182 - 5, doi: 10.1039/c6nr04959a; FULL TEXT
(NANOSAM)

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