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Low energy focused ion beam milling of silicon and germanium nanostructures

NANOTECHNOLOGY

Kolibal, M; Matlocha, T; Vystavel, T; Sikola, T, 2011: Low energy focused ion beam milling of silicon and germanium nanostructures. NANOTECHNOLOGY 22(10), doi: 10.1088/0957-4484/22/10/105304

Research Groups:

• Fabrication and Characterisation of Nanostructures

CEITEC authors:

• Miroslav Kolíbal, Ph.D.
• Prof. Tomáš Šikola