Optimization of ceramics bonding in the area of pressure sensor manufacturing

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

NOVOTNÝ, R.; VLACH, R.; KADLEC, J.; KUCHTA, R., 2014: Optimization of ceramics bonding in the area of pressure sensor manufacturing. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 20(42128), p. 719 - 10, doi: 10.1007/s00542-013-2013-7; FULL TEXT

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