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Precipitation in silicon wafers after high temperature preanneal studied by X-ray diffraction methods

PHYSICA B-CONDENSED MATTER

Meduna, M; Ruzicka, J; Caha, O; Bursik, J; Svoboda, M, 2012: Precipitation in silicon wafers after high temperature preanneal studied by X-ray diffraction methods. PHYSICA B-CONDENSED MATTER 407(15), p. 3002 - 3005, doi: 10.1016/j.physb.2011.08.063

Research Groups:

• Biophotonics Core Facility

CEITEC authors:

• Ondřej Caha, Ph.D.