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Sputter depth profiling of Mo/B4C/Si and Mo/Si multilayer nanostructures: A round-robin characterization by different techniques

THIN SOLID FILMS

Ber, B; Babor, P; Brunkov, PN; Chapon, P; Drozdov, MN; Duda, R; Kazantsev, D; Polkovnikov, VN; Yunin, P; Tolstogouzov, A, 2013: Sputter depth profiling of Mo/B4C/Si and Mo/Si multilayer nanostructures: A round-robin characterization by different techniques. THIN SOLID FILMS 540(1), p. 96 - 105, doi: 10.1016/j.tsf.2013.05.154

Research Groups:

• Fabrication and Characterisation of Nanostructures

CEITEC authors:

• Petr Bábor, Ph.D.