Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2
NANOTECHNOLOGY VIII
Chmela, O; Sadilek, J; Sama, J; Romano-Rodriguez, A; Hubalek, J; Vallejos, S, 2017: Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2. NANOTECHNOLOGY VIII 10248, doi: 10.1117/12.2265000
(RAITH, DWL, KAUFMAN, SCIA, RIE-FLUORINE, MAGNETRON, RIGAKU3)
Equipment:
- E-beam writer RAITH150 Two
- UV Direct Write Laser system Heidelberg Instruments DWL 66-fs
- Ion-Beam Sputter Deposition System BESTEC
- Ion beam etching Scia Systems Coat 200
- RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80
- Magnetron sputtering system BESTEC
- X-ray powder diffractometer Rigaku SmartLab 3kW
Research Groups:
CEITEC authors: