Share
Fabrication of well defined nanoporous structures with application in membrane sensing
Bachelor’s thesis
Fabianová, K., 2016: Fabrication of well defined nanoporous structures with application in membrane sensing. BACHELOR’S THESIS , p. 1 - 54
(PECVD, MIRA-EBL, RIE-FLUORINE, NANOCALC, MAGNETRON, EVAPORATOR, LYRA)
Equipment:
- Plasma Enhanced CVD of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 100
- Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS
- RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80
- Spectroscopic reflectometer Ocean Optics NanoCalc 2000
- Magnetron sputtering system BESTEC
- Electron beam evaporator BESTEC
- Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3
Research Groups: