Determination of elastic parameters of Si3N4 thin films by means of a numerical approach and bulge tests

THIN SOLID FILMS

TINOCO NAVARRO, H.; HOLZER, J.; PIKÁLEK, T.; BUCHTA, Z.; LAZAR, J.; CHLUPOVÁ, A.; KRUML, T.; HUTAŘ, P., 2019: Determination of elastic parameters of Si3N4 thin films by means of a numerical approach and bulge tests. THIN SOLID FILMS 672, p. 66 - 9, doi: 10.1016/j.tsf.2018.12.039; FULL TEXT

Research Groups:

CEITEC authors: