Determination of elastic parameters of Si3N4 thin films by means of a numerical approach and bulge tests
THIN SOLID FILMS
TINOCO NAVARRO, H.; HOLZER, J.; PIKÁLEK, T.; BUCHTA, Z.; LAZAR, J.; CHLUPOVÁ, A.; KRUML, T.; HUTAŘ, P., 2019: Determination of elastic parameters of Si3N4 thin films by means of a numerical approach and bulge tests. THIN SOLID FILMS 672, p. 66 - 9, doi: 10.1016/j.tsf.2018.12.039; FULL TEXT
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