Gecko mimicking surfaces
Master´s Thesis
Fecko, P., 2019: Gecko mimicking surfaces. MASTER´S THESIS , p. 1 - 52
(SUSS-RCD8, SUSS-MA8, DWL, DRIE, ALD, RIE-FLUORINE, PARYLENE, XEF2, LYRA, ICON-SPM)
Equipment:
- Resist coating and development system SÜSS MicroTec RCD8
- Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen3
- UV Direct Write Laser system Heidelberg Instruments DWL 66-fs
- Deep reactive ion etching of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 100
- Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200
- RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80
- SCS Parylene Deposition System
- XeF2 Etching of Silicon
- Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3
- Scanning Probe Microscope Bruker Dimension Icon
Research Groups:
CEITEC authors: