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Study of self-masking nanostructuring of boron doped diamond films by RF plasma etching

VACUUM

MARTON, M., RITOMSKY, M., MICHNIAK, P., BEHUL, M., REHACEK, V., REDHAMER, R., VINCZE, A., PAPULA, M., VOJS, M., 2019: Study of self-masking nanostructuring of boron doped diamond films by RF plasma etching. VACUUM 170, p. 1 - 22, doi: 10.1016/j.vacuum.2019.108954; FULL TEXT

Research Groups:

• Advanced Instrumentation and Methods for Materials Characterization

CEITEC authors:

• Martin Papula