Scanning Electron Microscope/E-beam writer TESCAN MIRA3 (MIRA)

Scanning Electron Microscope/E-beam writer TESCAN MIRA3
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Guarantor: Vojtěch Švarc
Technology / Methodology: Probe microscopy & Nanomanipulation
Instrument status: Some Issues Some Issues, 26.8.2019 09:21, Virtual Beam Control Error. Vibrations in the lab, limited resolution, long-term solution, we´re working on it
Equipment placement: CEITEC Nano - C1.29
Research group: CF: CEITEC Nano


Detailed description:

SEM is a type of microscope where a focused beam of electrons is scanned over the sample to generate an image or to modify the sample surface in nanometric resolution (usually better than 10 nm). The sample image is generated by detecting secondary and backscattered electrons emitted from the impact location of the beam. The tool is preferred for e-beam lithography, where the resist-coated sample is selectively exposed to the electron beam, allowing the preparation of very small patterns (< 50 nm and less) in the resistant surface. There can be further processing of the sample by wet chemistry (development, stripping). An interferometric stage can also be used to achieve ultimate resolution of electron beam lithography over a large area and to join more fields together.


Publications:

  • Hajduček, J., 2019: Substrate-controlled nucleation of the magnetic phase transtition in nanostructures. BACHELOR´S THESIS , p. 1 - 46
    (MAGNETRON, ICON-SPM, CRYOGENIC, MIRA, RIE-FLUORINE, EVAPORATOR)
  • Křižáková, V., 2018: Spin wave excitation and propagation in magnonic crystals prepared by focused ion beam direct writing. MASTER´S THESIS , p. 1 - 83
    (LYRA, HELIOS, ICON-SPM, MIRA, EVAPORATOR, WIRE-BONDER, KERR-MICROSCOPE)
  • Rovenská, K., 2018: Metallic nanostructures with three-dimensional topography for plasmonics. BACHELOR THESIS , p. 1 - 45
    (MIRA, EVAPORATOR, FTIR)
  • Horák, M.; Bukvišová, K.; Švarc, V.; Jaskowiec, J.; Křápek, V.; Šikola, T. , 2018: Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography. SCIENTIFIC REPORTS 8(1), p. 9640-1 - 9640-8, doi: 10.1038/s41598-018-28037-1
    (TITAN, HELIOS, MIRA, EVAPORATOR, ICON-SPM)
  • Procházka, P., 2018: Fabrication of graphene and study of its physical properties. PH.D. THESIS , p. 1 - 139
    (ALD, DIENER, EVAPORATOR, MIRA, PECVD, TERS, WIRE-BONDER)

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