Study of oxide precipitates in silicon using X-ray diffraction techniques

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

Caha, O; Bernatova, S; Meduna, M; Svoboda, M; Bursik, J, 2011: Study of oxide precipitates in silicon using X-ray diffraction techniques. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE 208(11), p. 2587 - 2590, doi: 10.1002/pssa.201184263

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