Study of uncertainties of height measurements of monoatomic steps on Si 5 x 5 using DFT

Measurement Science and Technology

CHARVÁTOVÁ CAMPBELL, A.; JELÍNEK, P.; KLAPETEK, P., 2017: Study of uncertainties of height measurements of monoatomic steps on Si 5 x 5 using DFT. MEASUREMENT SCIENCE AND TECHNOLOGY , p. 1 - 6, doi: 10.1088/1361-6501/aa5075; FULL TEXT

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