X-ray Photoelectron Spectroscopy Kratos Analytical Axis Supra (KRATOS-XPS)


Guarantor: Josef Polčák, Ph.D.
Instrument status: Some Issues Some Issues, 11.10.2019 09:59, Instrument is again operational after X-ray filament change. Charge neutraliser lower efficiency. Spare part (charge balance plate) ordered.
Equipment placement: CEITEC Nano - C1.38
Research group: CF: CEITEC Nano

Detailed description:

AXIS SupraTM is an X-ray photoelectron spectrometer (XPS) with unrivalled automation and ease of use for materials surface characterisation. The patented AXIS technology ensures high electron collection efficiency in spectroscopy mode and low aberrations at high magnifications in parallel imaging mode.
X-ray photoelectron spectroscopy (XPS) provides information on elemental composition and chemical bonding states of materials, Ultraviolet photoelectron spectroscopy (UPS) provides information on valence levels and work function measurements of materials, Low energy Ion Scattering spectroscopy (ISS) provides evaluation of the elemental composition and structure of solid surfaces. XPS mode is also capable of surface mapping to provide lateral distribution maps of elemental and chemical species at the surface.
The system is also equipped by Argon cluster ion source for sample cleaning or depth profiling.
Preparation chamber connected to the analysis chamber offers sample treatment in gas reaction chamber or deposition by effusion cell and afterwards in-situ analysis.


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  • Novák, T.; Kostelník, P.; Konečný, M.; Čechal, J.; Kolíbal, M.; Šikola, T., 2019: Temperature effect on Al predose and AlN nucleation affecting the buffer layer performance for the GaN-on-Si based high-voltage devices. JAPANESE JOURNAL OF APPLIED PHYSICS 58, p. SC1018-1 - SC1018-9, doi: 10.7567/1347-4065/ab0d00

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