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Home Research Selected Publications ALD Grown Dielectrics for Cap on a Chip: Fabrication and Characterization
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ALD Grown Dielectrics for Cap on a Chip: Fabrication and Characterization

Electronics Technology (ISSE)

Fillner, P; Hrdy, R; Prasek, J; Nespor, D; Hubalek, J, 2018: ALD Grown Dielectrics for Cap on a Chip: Fabrication and Characterization. ELECTRONICS TECHNOLOGY (ISSE)

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