Optical functions of silicon from reflectance and ellipsometry on silicon-on-insulator and homoepitaxial samples

JOURNAL OF APPLIED PHYSICS

Humlicek, J; Sik, J, 2015: Optical functions of silicon from reflectance and ellipsometry on silicon-on-insulator and homoepitaxial samples. JOURNAL OF APPLIED PHYSICS 118(19), doi: 10.1063/1.4936126