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Variable-angle spectroscopic ellipsometry of considerably non-uniform thin films

JOURNAL OF OPTICS

Necas, D; Ohlidal, I; Franta, D, 2011: Variable-angle spectroscopic ellipsometry of considerably non-uniform thin films. JOURNAL OF OPTICS 13(8), doi: 10.1088/2040-8978/13/8/085705

CEITEC authors:

• David Nečas, Ph.D.