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AFM imaging and fractal analysis of surface roughness of AIN epilayers on sapphire substrates

APPLIED SURFACE SCIENCE

Dallaeva, D; Talu, S; Stach, S; Skarvada, P; Tomanek, P; Grmela, L, 2014: AFM imaging and fractal analysis of surface roughness of AIN epilayers on sapphire substrates. APPLIED SURFACE SCIENCE 312, p. 81 - 86, doi: 10.1016/j.apsusc.2014.05.086

Research Groups:

• Advanced Instrumentation and Methods for Materials Characterization