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Algorithms for using silicon steps for scanning probe microscope evaluation

METROLOGIA

Garnaes, J.; Necas, D.; Nielsen, L.; Madsen, MH.; Torras-Rosell, A.; Zeng, G.; Klapetek, P.; Yacoot, A., 2020: Algorithms for using silicon steps for scanning probe microscope evaluation. METROLOGIA 57(6), p. 064002-1 - 14, doi: 10.1088/1681-7575/ab9ad3; FULL TEXT

CEITEC authors:

• Petr Klapetek, Ph.D.
• David Nečas, Ph.D.