Compact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring
ŠILHAN, L.; ARREGI URIBEETXEBARRIA, J.; PLICHTA, T.; VACULÍK, O.; NOVOTNÝ, J.; ŠERÝ, M., 2025: Compact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring. , doi: https://doi.org/10.1116/6.0004296; FULL TEXT
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