E-beam writer RAITH150 Two (RAITH)

Profilová karta (PDF)

Description:

Raith 150 Two is high-resolution low voltage electron beam lithography (EBL) and metrology system. It is suitable for the research and development of MEMS, micro and nanoelectronic, plasmonic, photonic systems, and integrated optical devices. It comes with sample holders capable of mounting up to 6´ substrate. The fabrication of 20 nm structures is guaranteed, while it is possible to write structures down to 10 nm in size. The system also contains FBMS (fixed beam moving stage) module for the writing of long continuous patterns without stitching errors, and the proximity effect correction SW package is available for optimized writing of near objects.
Raith 150 Two is equipped with an ultra-high-resolution Carl-Zeiss Gemini electron optics system. SEM image is recorded with help of InLens and SE detectors with the resolution of 1 – 2 nm at most acceleration voltages. The range of voltages is 0,3 – 30 kV and the user can select the apertures to control the beam current. High precision writing is possible due to the laser interferometric stage with the lateral movement resolution of 2 nm and large-scale Z travel.
This EBL system is suitable for long, time-demanding exposures also thanks to its split room setup, which ensures environmental isolation together with temperature stabilization.

Publications:

• ČERVINKA, O.; WEISS, V.; HRTOŇ, M.; BOUCHAL, P.; LIŠKA, P.; LIGMAJER, F.; ŠIKOLA, T.; VIEWEGH, P., 2026: Establishing a library of metasurface building blocks through coherence-controlled holographic microscopy. JOURNAL OF APPLIED PHYSICS 139(5), doi: 10.1063/5.0303155; FULL TEXT
  (RAITH, EVAPORATOR, ALD-FIJI, SCIA, DIENER)
• Singh, A.; Němec, H.; Kunc, J.; Kužel, P., 2025: . JOURNAL OF PHYSICS D: APPLIED PHYSICS 58(4), doi: 10.1088/1361-6463/ad8e71; FULL TEXT
  (RAITH, MIRA-EBL, RIE-FLUORINE)
• KRČMA, J.; WOJEWODA, O.; HRTOŇ, M.; HOLOBRÁDEK, J.; ARREGI URIBEETXEBARRIA, J.; PANDA, J.; PRIBYTOVA, E.; URBÁNEK, M., 2025: Mie-enhanced microfocused Brillouin light scattering for full wave vector resolution of nanoscale spin waves. SCIENCE ADVANCES 11(44), p. 1 - 9, doi: 10.1126/sciadv.ady8833; FULL TEXT
  (BRILLOUIN, EVAPORATOR, RAITH, RIGAKU9)
• Horký, M., 2025: . PH.D. THESIS , p. 1 - 181; FULL TEXT
  (RAITH, MIRA-EBL, LYRA, TEGRAMIN, SUSS-MA8, DEKTAK, NANOCALC, MAGNETRON, EVAPORATOR, RIE-FLUORINE, WIRE-BONDER, MPS150, CRYOGENIC, LAKESHORE, VERSALAB, ICON-SPM, UHV-PREPARATION, TITAN, HELIOS, VERIOS, RIGAKU3, RIGAKU9)
• ZENBAA, N.; LEVCHENKO, K.; PANDA, J.; DAVÍDKOVÁ, K.; RUHWEDEL, M.; KNAUER, S.; LINDNER, M.; DUBS, C.; WANG, Q.; URBÁNEK, M.; PIRRO, P.; CHUMAK, A., 2025: YIG/CoFeB Bilayer Magnonic Isolator. IEEE MAGNETICS LETTERS 16, p. 1 - 5, doi: 10.1109/LMAG.2025.3551990; FULL TEXT
  (VNA-MPI, BRILLOUIN, MIRA-EBL, EVAPORATOR, RAITH)

• Martyniuk, O.; Chaudhary, V.; Rhanbouri, MA.; Laguta, O.; Tahsin, M.; Gaskill, DK.; El Fatimy,A .; Neugebauer, P., 2025: Quantum dots array: an approach to multipixel devices. JOURNAL OF PHYSICS D-APPLIED PHYSICS 58(13), doi: 10.1088/1361-6463/adacf8; FULL TEXT
  (EVAPORATOR, RAITH, CRYOGENIC, KRATOS-XPS)
• Kunc, J.; Fridrišek, T.; Shestopalov, M.; Jo, J.; Park, K., 2024: . AIP ADVANCES 14(9), p. 1 - 9, doi: 10.1063/5.0223763; FULL TEXT
  (RAITH, RIE-FLUORINE, ALD-FIJI, EVAPORATOR, WIRE-BONDER, KRATOS-XPS)
• Rejhon, M.; Dědič, V.; Shestopalov, M.; Kunc, J.; Riedo, E., 2024: . NANOSCALE 16, p. 10590 - 10596, doi: 10.1039/D3NR06281C; FULL TEXT
  (RAITH)
• KLÍMA, J.; WOJEWODA, O.; ROUČKA, V.; MOLNÁR, T.; HOLOBRÁDEK, J.; URBÁNEK, M., 2024: . APPLIED PHYSICS LETTERS 124(11), doi: 10.1063/5.0189394; FULL TEXT
  (BRILLOUIN, EVAPORATOR, LYRA, KERR-MICROSCOPE, RAITH, ICON-SPM)
• Singh, A.; Němec, H.; Kunc, J.; Kužel, P., 2024: . PHYSICAL REVIEW RESEARCH 6(3), doi: 10.1103/PhysRevResearch.6.033063; FULL TEXT
  (RAITH, RIE-FLUORINE)
• Krčma, J., 2024: . BACHELOR'S THESIS ; FULL TEXT
  (EVAPORATOR, RAITH, RIE-FLUORINE, KAUFMAN, BRILLOUIN, VERIOS)
• WOJEWODA, O.; HOLOBRÁDEK, J.; PAVELKA, D.; PRIBYTOVA, E.; KRČMA, J.; KLÍMA, J.; PANDA, J.; MICHALIČKA, J.; LEDNICKÝ, T.; CHUMAK, A.; URBÁNEK, M., 2024: . APPLIED PHYSICS LETTERS 125(13), p. 1 - 6, doi: 10.1063/5.0218478; FULL TEXT
  (TITAN, BRILLOUIN, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, RAITH, VERSALAB)
• ROY, R.; HOLEC, D.; MICHAL, L.; HEMZAL, D.; SARKAR, S.; KUMAR, G.; NEČAS, D.; DHANKHAR, M.; KAUSHIK, P.; GOMEZ PEREZ, I.; ZAJÍČKOVÁ, L., 2024: . JOURNAL OF PHYSICS CONDENSED MATTER 36(26), p. 265601 - 12, doi: 10.1088/1361-648X/ad31bf; FULL TEXT
  (RAITH, EVAPORATOR, ICON-SPM, VERSALAB)
• Idesová, B., 2023: . MASTER'S THESIS , p. 1 - 71; FULL TEXT
  (EVAPORATOR, ALD-FIJI, RAITH, NANOCALC, SCIA)
• Schánilec, V. , 2023: . PH.D. THESIS , p. 1 - 128; FULL TEXT
  (RAITH, EVAPORATOR)
• KNAUER, S.; DAVÍDKOVÁ, K.; SCHMOLL, D.; SERHA, R.; VORONOV, A.; WANG, Q.; VERBA, R.; DOBROVOLSKIY, O.; LINDNER, M.; REIMANN, T.; DUBS, C.; URBÁNEK, M.; CHUMAK, A., 2023: . JOURNAL OF APPLIED PHYSICS 133(14), p. 1 - 8, doi: 10.1063/5.0137437; FULL TEXT
  (RAITH, RIE-FLUORINE, SCIA, BRILLOUIN, EVAPORATOR, VNA-MPI)
• WOJEWODA, O.; HRTOŇ, M.; DHANKHAR, M.; KRČMA, J.; DAVÍDKOVÁ, K.; KLÍMA, J.; HOLOBRÁDEK, J.; LIGMAJER, F.; ŠIKOLA, T.; URBÁNEK, M., 2023: . APPLIED PHYSICS LETTERS 122(20), p. 1 - 6, doi: 10.1063/5.0151338; FULL TEXT
  (RAITH, BRILLOUIN, LYRA, MAGNETRON, EVAPORATOR)
• WOJEWODA, O.; LIGMAJER, F.; HRTOŇ, M.; KLÍMA, J.; DHANKHAR, M.; DAVÍDKOVÁ, K.; STAŇO, M.; HOLOBRÁDEK, J.; KRČMA, J.; ZLÁMAL, J.; ŠIKOLA, T.; URBÁNEK, M., 2023: . COMMUNICATIONS PHYSICS 6(1), p. 1 - 10, doi: 10.1038/s42005-023-01214-z; FULL TEXT
  (RAITH, MIRA-EBL, EVAPORATOR, MAGNETRON, ALD-FIJI, LYRA, ICON-SPM, BRILLOUIN)
• Kunc, J.; Morzhuk, B.; Shestopalov, M.; Fridrišek, T.; Dědič, V., 2023: . REVIEW OF SCIENTIFIC INSTRUMENTS 94(5), doi: 10.1063/5.0139027; FULL TEXT
  (RAITH, MIRA-EBL, EVAPORATOR, RIE-FLUORINE)
• FLAJŠMAN, L.; WOJEWODA, O.; QIN, H.; DAVÍDKOVÁ, K.; URBÁNEK, M.; VAN DIJKEN, S., 2022: . APPLIED PHYSICS LETTERS 121(23), doi: 10.1063/5.0124764; FULL TEXT
  (BRILLOUIN, RAITH, EVAPORATOR)
• Sreedhara, MB.; Bukvisova, K.; Khadiev, A.; Citterberg, D.; Cohen, H.; Balema, V.; Pathak, AK.; Novikov, D.; Leitus, G.; Kaplan-Ashiri, I.; Kolibal, M.; Enyashin, AN.; Houben, L.; Tenne, R., 2022: . CHEMISTRY OF MATERIALS 34(4), p. 1838 - 16, doi: 10.1021/acs.chemmater.1c04106; FULL TEXT
  (TITAN, HELIOS, RAITH, EVAPORATOR, MPS150, KEITHLEY-4200, ALD-FIJI)
• MENDOSA-SANDOVAL, E.; RODRIGUEZ-LOPEZ, G.; ORDONEZ-ROMERO, C.; LAY, D.; QURESHI, N.; URBÁNEK, M.; SOLIS-IBARRA, D.; NOGUEZ, C.; LARA-GARCIA, H.; PIRRUCCIO, G., 2022: . JOURNAL OF MATERIALS CHEMISTRY C , p. 3704 - 9, doi: 10.1039/d1tc05331k; FULL TEXT
  (RAITH, MAGNETRON, RIE-CHLORINE, LYRA)
• Vaňatka, M., 2021: . PH.D. THESIS , p. 1 - 113; FULL TEXT
  (VERSALAB, VNA-MPI, TITAN, BRILLOUIN, MIRA-EBL, RAITH, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, VERIOS, WIRE-BONDER, LYRA)
• Zadorozhnii, O., 2021: . MASTER'S THESIS , p. 1 - 81; FULL TEXT
  (MAGNETRON, VERSALAB, KERR-MICROSCOPE, RAITH, RIE-FLUORINE, UHV-DEPOSITION, UHV-PREPARATION, UHV-XPS, LYRA)
• Dhankhar, M.;, 2021: . PH.D. THESIS , p. 1 - 100; FULL TEXT
  (KERR-MICROSCOPE, DWL, MIRA-EBL, RAITH, KAUFMAN, EVAPORATOR, MAGNETRON, ALD-FIJI, WIRE-BONDER, SUSS-RCD8, ICON-SPM)
• TURČAN, I.; FLAJŠMAN, L.; WOJEWODA, O.; ROUČKA, V.; MAN, O.; URBÁNEK, M., 2021: . APPLIED PHYSICS LETTERS 118(9), p. 1 - 5, doi: 10.1063/5.0041138; FULL TEXT
  (HELIOS, RAITH, KERR-MICROSCOPE, VERSALAB, VNA-MPI, BRILLOUIN, LYRA, ICON-SPM)
• VAŇATKA, M.; SZULC, K.; WOJEWODA, O.; DUBS, C.; CHUMAK, A.; KRAWCZYK, M.; DOBROVOLSKIY, O.; KLOS, J.; URBÁNEK, M., 2021: . PHYSICAL REVIEW APPLIED 16(5), p. 054033-1 - 10, doi: 10.1103/PhysRevApplied.16.054033; FULL TEXT
  (VNA-MPI, BRILLOUIN, RAITH, EVAPORATOR, MAGNETRON, DIENER, VERIOS, RIE-FLUORINE)
• Babocký, J., 2020: . PH.D. THESIS , p. 1 - 104; FULL TEXT
  (MIRA-EBL, RAITH, EVAPORATOR, SNOM-NANONICS, ICON-SPM)
• Tesař, J., 2020: . MASTER'S THESIS , p. 1 - 67
  (WITEC-RAMAN, MPS150, UHV-LEEM, EVAPORATOR, RAITH, WIRE-BONDER, ICON-SPM)
• Mentes, TO.; Genuzio, F.; Schanilec, V.; Sadilek, J.; Rougemaille, N.; Locatelli, A., 2020: . ULTRAMICROSCOPY 216, p. 113035-1 - 8, doi: 10.1016/j.ultramic.2020.113035; FULL TEXT
  (RAITH, EVAPORATOR)
• SCHÁNILEC, V.; CANALS, B.; UHLÍŘ, V.; FLAJŠMAN, L.; SADÍLEK, J.; ŠIKOLA, T.; ROUGEMAILLE, N., 2020: . PHYSICAL REVIEW LETTERS 125, p. 057203-1 - 5, doi: 10.1103/PhysRevLett.125.057203; FULL TEXT
  (RAITH, EVAPORATOR, VERIOS, ICON-SPM)
• Hache, T.; Vanatka, M.; Flajsman, L.; Weinhold, T.; Hula, T.; Ciubotariu, O.; Albrecht, M.; Arkook, B.; Barsukov, I.; Fallarino, L.; Hellwig, O.; Fassbender, J.; Urbanek, M.; Schultheiss, H., 2020: . PHYSICAL REVIEW APPLIED 13(5), p. 054009-1 - 10, doi: 10.1103/PhysRevApplied.13.054009; FULL TEXT
  (RAITH, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER, BRILLOUIN)
• Chmela, O., 2020: . PH.D THESIS , p. 1 - 199
  (ALD-FIJI, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, NANOCALC, MPS150, WIRE-BONDER, ICON-SPM)
• Jaskowiec, J., 2019: . MASTER'S THESIS , p. 1 - 55
  (MAGNETRON, MIRA-EBL, RAITH, CRYOGENIC, VERSALAB, ICON-SPM)
• Schánilec, V., 2018: . MASTER'S THESIS , p. 1 - 46
  (RAITH, EVAPORATOR, VERIOS, ICON-SPM)
• CHMELA, O.; SADÍLEK, J.; SAMA, DOMENECH-GIL, G.; J.; SOMER, J.; MOHAN, R.; ROMANO-RODRIGUEZ, A.; HUBÁLEK, J.; VALLEJOS VARGAS, S., 2018: . NANOSCALE 10(19), p. 9087 - 10, doi: 10.1039/c8nr01588k; FULL TEXT
  (RAITH, DWL, KAUFMAN, MAGNETRON, SCIA, RIE-FLUORINE, WIRE-BONDER, RIGAKU3)
• VAŇATKA, M.; URBÁNEK, M.; JÍRA, R.; FLAJŠMAN, L.; DHANKHAR, M.; IM, M.; MICHALIČKA, J.; UHLÍŘ, V.; ŠIKOLA, T., 2017: . AIP ADVANCES 7(10), p. 1 - 8, doi: 10.1063/1.5006235; FULL TEXT
  (DWL, EVAPORATOR, RAITH, TITAN, WIRE-BONDER)
• Chmela, O; Sadilek, J; Sama, J; Romano-Rodriguez, A; Hubalek, J; Vallejos, S, 2017: . NANOTECHNOLOGY VIII 10248, doi: 10.1117/12.2265000
  (RAITH, DWL, KAUFMAN, SCIA, RIE-FLUORINE, MAGNETRON, RIGAKU3)
• Jaskowiec, J., 2017: . BACHELOR'S THESIS , p. 1 - 47
  (MAGNETRON, MIRA-EBL, RAITH, CRYOGENIC, LYRA, ICON-SPM)

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