Electron beam evaporator BESTEC (EVAPORATOR)

Profilová karta (PDF)

Description:

The UHV physical vapor deposition system for thin-film e-beam deposition (mostly metals). A carousel for eight different materials, substrate rotation, and tilting is available.

Publications:

• KOVAŘÍK, M.; CITTERBERG, D.; PAIVA DE ARAÚJO, E.; ŠIKOLA, T.; KOLÍBAL, M., 2024: Understanding the Effect of Electron Irradiation on WS2 Nanotube Devices to Improve Prototyping Routines. ACS APPLIED ELECTRONIC MATERIALS 6(12), p. 8776 - 7, doi: 10.1021/acsaelm.4c01450; FULL TEXT
  (ALD, MIRA-EBL, EVAPORATOR, MPS150, KEITHLEY-4200, LYRA, LITESCOPE-LYRA, WITEC-RAMAN, WIRE-BONDER)
• KLÍMA, J.; WOJEWODA, O.; ROUČKA, V.; MOLNÁR, T.; HOLOBRÁDEK, J.; URBÁNEK, M., 2024: Zero-field spin wave turns. APPLIED PHYSICS LETTERS 124(11), doi: 10.1063/5.0189394; FULL TEXT
  (BRILLOUIN, EVAPORATOR, LYRA, KERR-MICROSCOPE, RAITH, ICON-SPM)
• Kunc, J.; Fridrišek, T.; Shestopalov, M.; Jo, J.; Park, K., 2024: Graphene–insulator–metal diodes: Enhanced dielectric strength of the Al2O3 barrier. AIP ADVANCES 14(9), p. 1 - 9, doi: 10.1063/5.0223763; FULL TEXT
  (RAITH, RIE-FLUORINE, ALD, EVAPORATOR, WIRE-BONDER, KRATOS-XPS)
• Krčma, J., 2024: Controlled Excitation of Magnons through Optically Induced Mie Resonances in Periodic Dielectric Nanostructures. BACHELOR´S THESIS ; FULL TEXT
  (EVAPORATOR, RAITH, RIE-FLUORINE, KAUFMAN, BRILLOUIN, VERIOS)
• JAKEŠOVÁ, M.; KUNOVSKÝ, O.; GABLECH, I.; KHODAGHOLY, D.; GELINAS, J.; GLOWACKI, E., 2024: Coupling of photovoltaics with neurostimulation electrodes-optical to electrolytic transduction. JOURNAL OF NEURAL ENGINEERING 21(4), doi: 10.1088/1741-2552/ad593d; FULL TEXT
  (PARYLENE-SCS, MAGNETRON, SUSS-MA8, EVAPORATOR, RIE-FLUORINE, DIENER, WIRE-BONDER)

• GRYSZEL, M.; JAKEŠOVÁ, M.; VU, X.; INGEBRANDT, S.; GLOWACKI, E., 2024: Elevating Platinum to Volumetric Capacitance: High Surface Area Electrodes through Reactive Pt Sputtering. ADVANCED HEALTHCARE MATERIALS , doi: 10.1002/adhm.202302400; FULL TEXT
  (EVAPORATOR, DEKTAK, RIE-FLUORINE, DWL, SUSS-MA8)
• KRPENSKÝ, J.; HORÁK, M.; KABÁT, J.; PLANER, J.; KEPIČ, P.; KŘÁPEK, V.; KONEČNÁ, A., 2024: Analytical electron microscopy analysis of insulating and metallic phases in nanostructured vanadium dioxide. NANOSCALE ADVANCES 6(13), p. 3338 - 9, doi: 10.1039/d4na00338a; FULL TEXT
  (TITAN, LYRA, EVAPORATOR)
• WOJEWODA, O.; HOLOBRÁDEK, J.; PAVELKA, D.; PRIBYTOVA, E.; KRČMA, J.; KLÍMA, J.; PANDA, J.; MICHALIČKA, J.; LEDNICKÝ, T.; CHUMAK, A.; URBÁNEK, M., 2024: Unidirectional propagation of zero-momentum magnons. APPLIED PHYSICS LETTERS 125(13), p. 1 - 6, doi: 10.1063/5.0218478; FULL TEXT
  (TITAN, BRILLOUIN, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, RAITH, VERSALAB)
• FAWAEER, S.; AL-QAISI, W.; SEDLÁKOVÁ, V.; TRUNEC, M.; SOBOLA, D.; MOUSA, M., 2024: Nanometer - Thick titanium film as a silicon migration barrier. MATERIALS TODAY COMMUNICATIONS 40, p. 1 - 17, doi: 10.1016/j.mtcomm.2024.109326; FULL TEXT
  (KRATOS-XPS, WITEC-RAMAN, ICON-SPM, EVAPORATOR)
• ROY, R.; HOLEC, D.; MICHAL, L.; HEMZAL, D.; SARKAR, S.; KUMAR, G.; NEČAS, D.; DHANKHAR, M.; KAUSHIK, P.; GOMEZ PEREZ, I.; ZAJÍČKOVÁ, L., 2024: Possible charge ordering and anomalous transport in graphene/graphene quantum dot heterostructure. JOURNAL OF PHYSICS CONDENSED MATTER 36(26), p. 265601 - 12, doi: 10.1088/1361-648X/ad31bf; FULL TEXT
  (RAITH, EVAPORATOR, ICON-SPM, VERSALAB)
• AIGNER, A.; LIGMAJER, F.; ROVENSKÁ, K.; HOLOBRÁDEK, J.; IDESOVÁ, B.; MAIER, S.; TITTL, A.; MENEZES, L., 2024: Engineering of Active and Passive Loss in High-Quality-Factor Vanadium Dioxide-Based BIC Metasurfaces. NANO LETTERS 24(35), p. 10742 - 8, doi: 10.1021/acs.nanolett.4c01703; FULL TEXT
  (KAUFMAN, ALD, EVAPORATOR)
• Bevz, VM.; Mikhailov, MY.; Budinska, B.; Lamb-Camarena, S.; Shpilinska, SO.; Chumak, AV.; Urbanek, M.; Arndt, M.; Lang, W.; Dobrovolskiy, OV., 2023: Vortex Counting and Velocimetry for Slitted Superconducting Thin Strips. PHYSICAL REVIEW APPLIED 19(3), doi: 10.1103/PhysRevApplied.19.034098; FULL TEXT
  (DWL, LYRA, EVAPORATOR)
• GALLINA, P.; KVAPIL, M.; LIŠKA, J.; KONEČNÁ, A.; KŘÁPEK, V.; KALOUSEK, R.; ZLÁMAL, J.; ŠIKOLA, T., 2023: Strong coupling in an Au plasmonic antenna-SiO2 layer system: A hybrid-mode analysis. PHYSICAL REVIEW B 107(12), p. 125144 - 6, doi: 10.1103/PhysRevB.107.125144; FULL TEXT
  (ALD, EVAPORATOR, MIRA-EBL, FTIR, NANOCALC, DEKTAK, WOOLLAM-MIR, ICON-SPM)
• GALLINA, P.; KONEČNÁ, A.; LIŠKA, J.; IDROBO, J.; ŠIKOLA, T., 2023: Strongly Coupled Plasmon and Phonon Polaritons as Seen by Photon and Electron Probes. PHYSICAL REVIEW APPLIED 19(2), p. 24042 - 11, doi: 10.1103/PhysRevApplied.19.024042; FULL TEXT
  (MIRA-EBL, EVAPORATOR, FTIR)
• WOJEWODA, O.; LIGMAJER, F.; HRTOŇ, M.; KLÍMA, J.; DHANKHAR, M.; DAVÍDKOVÁ, K.; STAŇO, M.; HOLOBRÁDEK, J.; KRČMA, J.; ZLÁMAL, J.; ŠIKOLA, T.; URBÁNEK, M., 2023: Observing high-k magnons with Mie-resonance-enhanced Brillouin light scattering. COMMUNICATIONS PHYSICS 6(1), p. 1 - 10, doi: 10.1038/s42005-023-01214-z; FULL TEXT
  (RAITH, MIRA-EBL, EVAPORATOR, MAGNETRON, ALD, LYRA, ICON-SPM, BRILLOUIN)
• WOJEWODA, O.; HRTOŇ, M.; DHANKHAR, M.; KRČMA, J.; DAVÍDKOVÁ, K.; KLÍMA, J.; HOLOBRÁDEK, J.; LIGMAJER, F.; ŠIKOLA, T.; URBÁNEK, M., 2023: Phase-resolved optical characterization of nanoscale spin waves. APPLIED PHYSICS LETTERS 122(20), p. 1 - 6, doi: 10.1063/5.0151338; FULL TEXT
  (RAITH, BRILLOUIN, LYRA, MAGNETRON, EVAPORATOR)
• Kunc, J.; Morzhuk, B.; Shestopalov, M.; Fridrišek, T.; Dědič, V., 2023: Spectral current density and responsivity scaling for Fourier transform photocurrent spectroscopy. REVIEW OF SCIENTIFIC INSTRUMENTS 94(5), doi: 10.1063/5.0139027; FULL TEXT
  (RAITH, MIRA-EBL, EVAPORATOR, RIE-FLUORINE)
• KNAUER, S.; DAVÍDKOVÁ, K.; SCHMOLL, D.; SERHA, R.; VORONOV, A.; WANG, Q.; VERBA, R.; DOBROVOLSKIY, O.; LINDNER, M.; REIMANN, T.; DUBS, C.; URBÁNEK, M.; CHUMAK, A., 2023: Propagating spin-wave spectroscopy in a liquid-phase epitaxial nanometer-thick YIG film at millikelvin temperatures. JOURNAL OF APPLIED PHYSICS 133(14), p. 1 - 8, doi: 10.1063/5.0137437; FULL TEXT
  (RAITH, RIE-FLUORINE, SCIA, BRILLOUIN, EVAPORATOR, VNA-MPI)
• Klíma, J., 2023: Spin waves in non-trivial magnetic landscapes. BACHELOR´S THESIS , p. 1 - 69; FULL TEXT
  (MIRA-EBL, LYRA, ICON-SPM, KERR-MICROSCOPE, BRILLOUIN, EVAPORATOR)
• BRODSKÝ, J.; GABLECH, I.; MIGLIACCIO, L.; HAVLÍČEK, M.; DONAHUE, M.; GLOWACKI, E., 2023: Downsizing the Channel Length of Vertical Organic Electrochemical Transistors. ACS APPL MATER INTER 15(22), p. 27002 - 8, doi: 10.1021/acsami.3c02049; FULL TEXT
  (SUSS-MA8, EVAPORATOR, SCIA, PARYLENE-SCS, RIE-FLUORINE, MIRA-EBL, DEKTAK, ICON-SPM)
• RONOH, K.; HEKMAT, S.; HOLCMAN, V.; KNÁPEK, A.; SOBOLA, D., 2023: Comprehensive characterization of different metallic thin films on highly oriented pyrolytic graphite substrate. VACUUM 215, p. 1 - 16, doi: 10.1016/j.vacuum.2023.112345; FULL TEXT
  (EVAPORATOR, KRATOS-XPS, VERIOS, ICON-SPM, WITEC-RAMAN)
• HEMZAL, D.; PRÁŠEK, J.; HRDÝ, R.; DRBOHLAVOVÁ, J.; KOPP, R., 2023: Surface-enhanced Raman spectroscopy investigation of PO3- (4) to Ag/Al2O3 nanopatterned substrates binding and its dynamics for sensitive detection of phosphate in water. JOURNAL OF RAMAN SPECTROSCOPY , p. 1074 - 10, doi: 10.1002/jrs.6587; FULL TEXT
  (EVAPORATOR, ALD)
• Idesová, B., 2023: Design and fabrication of dielectric metasurfaces for ultraviolet wavelengths. MASTER´S THESIS , p. 1 - 71; FULL TEXT
  (EVAPORATOR, ALD, RAITH, NANOCALC, SCIA)
• LAMB-CAMARENA, S.; PORRATI, F.; KUPRAVA, A.; WANG, Q.; URBÁNEK, M.; BARTH, S.; MAKAROV, D.; HUTH, M.; DOBROVOLSKIY, O., 2023: 3D Magnonic Conduits by Direct Write Nanofabrication. NANOMATERIALS 13(13), doi: 10.3390/nano13131926; FULL TEXT
  (MIRA-EBL, EVAPORATOR, BRILLOUIN)
• ROVENSKÁ, K.; LIGMAJER, F.; IDESOVÁ, B.; KEPIČ, P.; LIŠKA, J.; CHOCHOL, J.; ŠIKOLA, T., 2023: Structural color filters with compensated angle-dependent shifts. OPTICS EXPRESS 31(26), p. 43048 - 9, doi: 10.1364/OE.506069; FULL TEXT
  (EVAPORATOR, MIRA-EBL, RIE-CHLORINE, ALD, SNOM-NANONICS, TUBE-FURNACE)
• Schánilec, V. , 2023: Artificial arrays of magnetic nanostructures. PH.D. THESIS , p. 1 - 128; FULL TEXT
  (RAITH, EVAPORATOR)
• ŠVARC, V.; BARTOŠÍK, M.; KONEČNÝ, M.; PIASTEK, J.; NEZVAL, D.; MACH, J.; ŠIKOLA, T., 2023: Side charge propagation in simultaneous KPFM and transport measurement of humidity exposed graphene FET sensor. CARBON 215, p. 118471 - 12, doi: 10.1016/j.carbon.2023.118471; FULL TEXT
  (RIE-FLUORINE, EVAPORATOR, MIRA-EBL, WIRE-BONDER)
• Děcký, M., 2022: Fabrication and testing of microbolometer or other infrared detector based on plasmonic antennas. BACHELOR´S THESIS , p. 1 - 44; FULL TEXT
  (LYRA, MIRA-EBL, EVAPORATOR, DWL, MPS150)
• ABUDLLAEVA, O.; SAHALIANOV, I.; EJNEBY, M.; JAKEŠOVÁ, M.; ZOZOULENKO, I.; LIIN, S.; GLOWACKI, E., 2022: Faradaic Pixels for Precise Hydrogen Peroxide Delivery to Control M-Type Voltage-Gated Potassium Channels. ADVANCED SCIENCE , p. 1 - 14, doi: 10.1002/advs.202103132; FULL TEXT
  (DIENER, EVAPORATOR, SUSS-MA8, PARYLENE-SCS, RIE-FLUORINE)
• GABLECH, I.; BRODSKÝ, J.; VYROUBAL, P.; PIASTEK, J.; BARTOŠÍK, M.; PEKÁREK, J., 2022: Mechanical strain and electric-field modulation of graphene transistors integrated on MEMS cantilevers. JOURNAL OF MATERIALS SCIENCE 57(3), p. 1923 - 13, doi: 10.1007/s10853-021-06846-6; FULL TEXT
  (RIE-FLUORINE, DRIE, EVAPORATOR, WIRE-BONDER, WITEC-RAMAN, MPS150, KEITHLEY-4200, SUSS-MA8, DWL)
• Midlik, Š.; Sadílek, J.; Xie, Z.; Huang, Y.; Schmoranzer, D., 2022: Silicon Vibrating Micro-Wire Resonators for Study of Quantum Turbulence in Superfluid He-4. JOURNAL OF LOW TEMPERATURE PHYSICS , doi: 10.1007/s10909-022-02675-2; FULL TEXT
  (PECVD, RIE-FLUORINE, SUSS-MA8, SUSS-RCD8, EVAPORATOR, DWL, LYRA)
• Krpenský, J., 2022: Fabrication, optimization and in-situ characterization of thermally tunable vanadium dioxide nanostructures. MASTER´S THESIS ; FULL TEXT
  (EVAPORATOR, UHV-PREPARATION, VERIOS, TITAN, LYRA)
• Sreedhara, MB.; Bukvisova, K.; Khadiev, A.; Citterberg, D.; Cohen, H.; Balema, V.; Pathak, AK.; Novikov, D.; Leitus, G.; Kaplan-Ashiri, I.; Kolibal, M.; Enyashin, AN.; Houben, L.; Tenne, R., 2022: Nanotubes from the Misfit Layered Compound (SmS)(1.)19TaS2: Atomic Structure, Charge Transfer, and Electrical Properties. CHEMISTRY OF MATERIALS 34(4), p. 1838 - 16, doi: 10.1021/acs.chemmater.1c04106; FULL TEXT
  (TITAN, HELIOS, RAITH, EVAPORATOR, MPS150, KEITHLEY-4200, ALD)
• FLAJŠMAN, L.; WOJEWODA, O.; QIN, H.; DAVÍDKOVÁ, K.; URBÁNEK, M.; VAN DIJKEN, S., 2022: Wideband Brillouin light scattering analysis of spin waves excited by a white-noise RF generator. APPLIED PHYSICS LETTERS 121(23), doi: 10.1063/5.0124764; FULL TEXT
  (BRILLOUIN, RAITH, EVAPORATOR)
• SCHÁNILEC, V.; BRUNN, O.; HORÁČEK, M.; KRÁTKÝ, S.; MELUZÍN, P.; ŠIKOLA, T.; CANALS, B.; ROUGEMAILLE, N., 2022: Approaching the Topological Low-Energy Physics of the F Model in a Two-Dimensional Magnetic Lattice. PHYSICAL REVIEW LETTERS 129(2), p. 27202 - 6, doi: 10.1103/PhysRevLett.129.027202; FULL TEXT
  (EVAPORATOR, ICON-SPM)
• KARTCI, A.; VANČÍK, S.; PRÁŠEK, J.; HRDÝ, R.; SCHNEIDER, M.; SCHMID, U.; HUBÁLEK, J., 2022: Comparison of on-chip MIS capacitors based on stacked HfO2/Al2O3 nanolaminates. MATERIALS TODAY COMMUNICATIONS 33, p. 1 - 8, doi: 10.1016/j.mtcomm.2022.104664; FULL TEXT
  (ALD, EVAPORATOR, SUSS-MA8, SUSS-RCD8, MAGNETRON, TITAN, MPS150, KEITHLEY-4200, SUMMIT, KRATOS-XPS)
• Fridrišek, T., 2022: Optical gating of epitaxial graphene. MASTER´S THESIS
  (MIRA-EBL, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER, LYRA)
• Vodička, M., 2022: Fabrication and characterisation of plasmonic antennas on selected thin film with aim to get enhanced absorption due to presence of strong coupling. BACHELOR´S THESIS , p. 1 - 60; FULL TEXT
  (MIRA-EBL, FTIR, EVAPORATOR, MPS150)
• KEPIČ, P.; LIGMAJER, F.; HRTOŇ, M.; REN, H.; MENEZES, L.; MAIER, S.; ŠIKOLA, T., 2021: Optically Tunable Mie Resonance VO2 Nanoantennas for Metasurfaces in the Visible. ACS PHOTONICS 8(4), p. 1048 - 10, doi: 10.1021/acsphotonics.1c00222; FULL TEXT
  (EVAPORATOR, MIRA-EBL, WITEC-RAMAN, WOOLLAM-VIS)
• Dhankhar, M.;, 2021: Magnetic vortex based memory device. PH.D. THESIS , p. 1 - 100; FULL TEXT
  (KERR-MICROSCOPE, DWL, MIRA-EBL, RAITH, KAUFMAN, EVAPORATOR, MAGNETRON, ALD, WIRE-BONDER, SUSS-RCD8, ICON-SPM)
• Kepič, P., 2021: Design and fabrication of tunable dielectric metasurfaces for visible and infrared wavelengths. MASTER´S THESIS , p. 1 - 76; FULL TEXT
  (MIRA-EBL, EVAPORATOR, DEKTAK, WITEC-RAMAN, KRATOS-XPS, SNOM-NANONICS, LYRA, ICON-SPM)
• KAUSHIK, P.; ELIÁŠ, M.; PRÁŠEK, J.; MICHALIČKA, J.; ZAJÍČKOVÁ, L., 2021: Manipulating MWCNT/TiO2 heterostructure morphology at nanoscale and its implications to NO2 sensing properties. MATERIALS CHEMISTRY AND PHYSICS 271, p. 124901-1 - 11, doi: 10.1016/j.matchemphys.2021.124901; FULL TEXT
  (EVAPORATOR, PECVD-NANOFAB, DIENER, ALD, RIGAKU9, VERIOS, TITAN)
• VAŇATKA, M.; SZULC, K.; WOJEWODA, O.; DUBS, C.; CHUMAK, A.; KRAWCZYK, M.; DOBROVOLSKIY, O.; KLOS, J.; URBÁNEK, M., 2021: Spin-Wave Dispersion Measurement by Variable-Gap Propagating Spin-Wave Spectroscopy. PHYSICAL REVIEW APPLIED 16(5), p. 054033-1 - 10, doi: 10.1103/PhysRevApplied.16.054033; FULL TEXT
  (VNA-MPI, BRILLOUIN, RAITH, EVAPORATOR, MAGNETRON, DIENER, VERIOS, RIE-FLUORINE)
• Kormoš, L., 2021: 2D molecular systems at surfaces. PH.D. THESIS , p. 1 - 140; FULL TEXT
  (UHV-DEPOSITION, UHV-PREPARATION, UHV-XPS, UHV-LEEM, UHV-SPM, EVAPORATOR)
• Slavík, J., 2021: Patterning of excitable cells on multi-electrode arrays. PH.D. THESIS , p. 1 - 102; FULL TEXT
  (DWL, EVAPORATOR, PARYLENE-SCS, RIE-FLUORINE, MAGNETRON, LEICACOAT-NANO, LYRA, ICON-SPM)
• Pejchal, T., 2021: Towards highly-doped Ge and ZnO nanowires: Growth, characterization and doping level analysis. PH.D. THESIS ; FULL TEXT
  (NANOSAM, WITEC-RAMAN, UHV-DEPOSITION, UHV-PREPARATION, VERIOS, KRATOS-XPS, HELIOS, TITAN, ALD, EVAPORATOR, MIRA-EBL, MPS150)
• Brodský J., 2021: Gas sensors based on 1D and 2D materials. MASTER´S THESIS , p. 1 - 84; FULL TEXT
  (DWL, DIENER, SUSS-RCD8, SUSS-MA8, EVAPORATOR, MPS150, WITEC-RAMAN, RIE-FLUORINE, DRIE, LYRA, ICON-SPM)
• Idesová, B., 2021: Plasmonically active nanostructures for optical filtering. BACHELOR´S THESIS , p. 1 - 47; FULL TEXT
  (EVAPORATOR, MIRA-EBL, FTIR)
• GHAHFAROKHI, M.; ARREGI URIBEETXEBARRIA, J.; CASOLI, F.; HORKÝ, M.; CABASSI, R.; UHLÍŘ, V.; ALBERTINI, F., 2021: Microfabricated ferromagnetic-shape-memory Heuslers: The geometry and size effects. APPLIED MATERIALS TODAY 23, p. 101058-1 - 11, doi: 10.1016/j.apmt.2021.101058; FULL TEXT
  (VERSALAB, RIGAKU9, KERR-MICROSCOPE, SUSS-MA8, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER, VERIOS)
• Vaňatka, M., 2021: Static and dynamic properties of nanostructured magnetic materials. PH.D. THESIS , p. 1 - 113; FULL TEXT
  (VERSALAB, VNA-MPI, TITAN, BRILLOUIN, MIRA-EBL, RAITH, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, VERIOS, WIRE-BONDER, LYRA)
• BARTOŠÍK, M.; MACH, J.; PIASTEK, J.; NEZVAL, D.; KONEČNÝ, M.; ŠVARC, V.; ENSSLIN, K.; ŠIKOLA, T., 2020: Mechanism and Suppression of Physisorbed-Water-Caused Hysteresis in Graphene FET Sensors. ACS SENSORS 5(9), p. 2940 - 10, doi: 10.1021/acssensors.0c01441; FULL TEXT
  (EVAPORATOR, DWL, DIENER)
• KŘÁPEK, V.; KONEČNÁ, A.; HORÁK, M.; LIGMAJER, F.; STÖGER-POLLACH, M.; HRTOŇ, M.; BABOCKÝ, J.; ŠIKOLA, T., 2020: Independent engineering of individual plasmon modes in plasmonic dimers with conductive and capacitive coupling. NANOPHOTONICS 9(3), p. 623 - 10, doi: 10.1515/nanoph-2019-0326; FULL TEXT
  (HELIOS, MIRA-EBL, TITAN, LEICACOAT-STAN, FTIR, EVAPORATOR)
• Horák, M., 2020: Electron microscopy and spectroscopy in plasmonics. PH.D. THESIS , p. 1 - 129; FULL TEXT
  (TITAN, HELIOS, VERIOS, LEICACOAT-STAN, EVAPORATOR, MAGNETRON, MIRA-EBL, LYRA, ICON-SPM)
• GABLECH, I.; BRODSKÝ, J.; PEKÁREK, J.; NEUŽIL, P., 2020: Infinite selectivity of wet SiO2 etching in respect to Al. MICROMACHINES 11(4), p. 365 - 7, doi: 10.3390/mi11040365; FULL TEXT
  (EVAPORATOR, SUSS-MA8, RIE-CHLORINE, DWL, SUSS-RCD8)
• Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS , p. 1 - 199
  (ALD, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, NANOCALC, MPS150, WIRE-BONDER, ICON-SPM)
• Wojewoda, O.; Hula, T.; Flajsman, L.; Vanatka, M.; Gloss, J.; Holobradek, J.; Stano, M.; Stienen, S.; Korber, L.; Schultheiss, K.; Schmid, M.; Schultheiss, H.; Urbanek, M , 2020: Propagation of spin waves through a Neel domain wall. APPLIED PHYSICS LETTERS 117(2), p. 022405-1 - 5, doi: 10.1063/5.0013692; FULL TEXT
  (EVAPORATOR, KERR-MICROSCOPE, BRILLOUIN, MIRA-EBL, LYRA, ICON-SPM)
• Hache, T.; Vanatka, M.; Flajsman, L.; Weinhold, T.; Hula, T.; Ciubotariu, O.; Albrecht, M.; Arkook, B.; Barsukov, I.; Fallarino, L.; Hellwig, O.; Fassbender, J.; Urbanek, M.; Schultheiss, H., 2020: Freestanding Positionable Microwave-Antenna Device for Magneto-Optical Spectroscopy Experiments. PHYSICAL REVIEW APPLIED 13(5), p. 054009-1 - 10, doi: 10.1103/PhysRevApplied.13.054009; FULL TEXT
  (RAITH, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER, BRILLOUIN)
• SCHÁNILEC, V.; CANALS, B.; UHLÍŘ, V.; FLAJŠMAN, L.; SADÍLEK, J.; ŠIKOLA, T.; ROUGEMAILLE, N., 2020: Bypassing Dynamical Freezing in Artificial Kagome Ice. PHYSICAL REVIEW LETTERS 125, p. 057203-1 - 5, doi: 10.1103/PhysRevLett.125.057203; FULL TEXT
  (RAITH, EVAPORATOR, VERIOS, ICON-SPM)
• Mentes, TO.; Genuzio, F.; Schanilec, V.; Sadilek, J.; Rougemaille, N.; Locatelli, A., 2020: Coherent x-ray scattering in an XPEEM setup. ULTRAMICROSCOPY 216, p. 113035-1 - 8, doi: 10.1016/j.ultramic.2020.113035; FULL TEXT
  (RAITH, EVAPORATOR)
• Rovenská, K., 2020: Dielectric metasurfaces as modern optical components. MASTER´S THESIS , p. 1 - 57
  (MAGNETRON, DEKTAK, KRATOS-XPS, MIRA-EBL, EVAPORATOR, VERIOS, RIE-FLUORINE, ALD)
• Tesař, J., 2020: Fabrication and characterization of atomically thin layers. MASTER´S THESIS , p. 1 - 67
  (WITEC-RAMAN, MPS150, UHV-LEEM, EVAPORATOR, RAITH, WIRE-BONDER, ICON-SPM)
• LIŠKA, J.; LIGMAJER, F.; PINHO NASCIMENTO, P.; KEJÍK, L.; KVAPIL, M.; DVOŘÁK, P.; HORKÝ, M.; LEITNER, N.; REIMHULT, E.; ŠIKOLA, T., 2020: Effect of deposition angle on fabrication of plasmonic gold nanocones and nanodiscs. MICROELECTRONIC ENGINEERING 228, p. 1 - 6, doi: 10.1016/j.mee.2020.111326; FULL TEXT
  (EVAPORATOR, RIE-FLUORINE, MIRA-EBL, LYRA, ICON-SPM)
• Babocký, J., 2020: Fabrication and characterization of nanostructures with functional properties in the field of plasmonics. PH.D. THESIS , p. 1 - 104; FULL TEXT
  (MIRA-EBL, RAITH, EVAPORATOR, SNOM-NANONICS, ICON-SPM)
• Wojewoda, O., 2020: Phase-resolved Brillouin light scattering: development and applications. MASTER´S THESIS ; FULL TEXT
  (BRILLOUIN, EVAPORATOR, MIRA-EBL, KERR-MICROSCOPE, LYRA, ICON-SPM)
• Citterberg, D., 2019: Integration of nanostuctures into functional devices. MASTER´S THESIS , p. 1 - 50
  (MIRA-EBL, EVAPORATOR, WITEC-RAMAN, WIRE-BONDER, TITAN, MPS150)
• HAVRANOVÁ, P.; LIGMAJER, F.; DAŇHEL, A., 2019: Electrodeposition of Silver Amalgam on Thin Gold Film Electrodes for Voltammetric Detection of 4-Nitrophenol and DNA Labeled with Osmium Tetroxide-Bipyridine Complex. ELECTROANALYSIS 31, p. 1952 - 9, doi: 10.1002/elan.201900306; FULL TEXT
  (VERIOS, EVAPORATOR)
• KAUSHIK, P.; ELIÁŠ, M.; MICHALIČKA, J.; HEGEMANN, D.; PYTLÍČEK, Z.; NEČAS, D.; ZAJÍČKOVÁ, L., 2019: Atomic layer deposition of titanium dioxide on multi-walled carbon nanotubes for ammonia gas sensing. SURFACE AND COATINGS TECHNOLOGY 370, p. 235 - 9, doi: 10.1016/j.surfcoat.2019.04.031; FULL TEXT
  (ALD, EVAPORATOR, PECVD-NANOFAB, WOOLLAM-VIS, VERIOS, TITAN, KRATOS-XPS, RIGAKU3)
• Brodský, J., 2019: Characterization of graphene elecrical properties on MEMS structures. BACHELOR´S THESIS , p. 1 - 50
  (MPS150, WITEC-RAMAN, EVAPORATOR, DRIE, PECVD, DWL, SUSS-MA8, RIE-FLUORINE, RIE-CHLORINE, DIENER, SCIA)
• KASPAR, P.; SOBOLA, D.; DALLAEV, R.; RAMAZANOV, S.; NEBOJSA, A.; REZAEE, S.; GRMELA, L., 2019: Characterization of Fe2O3 thin film on highly oriented pyrolytic graphite by AFM, Ellipsometry and XPS. APPLIED SURFACE SCIENCE 493, p. 673 - 6, doi: 10.1016/j.apsusc.2019.07.058; FULL TEXT
  (EVAPORATOR, WOOLLAM-VIS, KRATOS-XPS, ICON-SPM)
• Hajduček, J., 2019: Substrate-controlled nucleation of the magnetic phase transtition in nanostructures. BACHELOR´S THESIS , p. 1 - 46
  (MAGNETRON, CRYOGENIC, MIRA-EBL, RIE-FLUORINE, EVAPORATOR, VERSALAB, ICON-SPM)
• Mouralova, K.; Zahradnicek, R.; Bednar, J., 2019: Study of vertical graphene growth on silver substrate based on design of experiment. DIAMOND AND RELATED MATERIALS 97, p. 107439-1 - 107439-7, doi: 10.1016/j.diamond.2019.107439
  (EVAPORATOR, PECVD-NANOFAB, VERIOS, TERS, HELIOS, TITAN, ICON-SPM)
• Hegrová, V., 2019: Application of correlative AFM/SEM microscopy. MASTER´S THESIS , p. 1 - 64
  (LITESCOPE-LYRA, MIRA-EBL, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER, LYRA)
• Vida, J., 2019: Deposition of ternary oxides with titanium and characterization of their optical and electrical properties. MASTER´S THESIS , p. 1 - 50
  (ALD, WOOLLAM-VIS, VUVAS, EVAPORATOR, SUSS-MA8, SUMMIT, KRATOS-XPS, RIGAKU3)
• HRDÝ, R.; PRÁŠEK, J.; FILLNER, P.; VANČÍK, S.; SCHNEIDER, M.; HUBÁLEK, J.; SCHMID, U., 2019: Development of HfO2/Al2O3 Stack for On-Chip Capacitor Applications. INTERNATIONAL SPRING SEMINAR ON ELECTRONICS TECHNOLOGY ISSE , p. 1 - 4, doi: 10.1109/ISSE.2019.8810156; FULL TEXT
  (ALD, SUSS-MA8, EVAPORATOR, SUSS-RCD8, DWL, RIE-CHLORINE)
• PRÁŠEK, J.; HOUŠKA, D.; HRDÝ, R.; HUBÁLEK, J.; SCHMID, U., 2019: Optimization of Cryogenic Deep Reactive Ion Etching Process for On-Chip Energy Storage. INTERNATIONAL SPRING SEMINAR ON ELECTRONICS TECHNOLOGY ISSE , p. 1 - 6, doi: 10.1109/ISSE.2019.8810293; FULL TEXT
  (DRIE, SUSS-MA8, SUSS-RCD8, EVAPORATOR, DWL, ICON-SPM)
• BOUCHAL, P.; DVOŘÁK, P.; BABOCKÝ, J.; BOUCHAL, Z.; LIGMAJER, F.; HRTOŇ, M.; KŘÁPEK, V.; FAßBENDER, A.; LINDEN, S.; CHMELÍK, R.; ŠIKOLA, T., 2019: High-Resolution Quantitative Phase Imaging of Plasmonic Metasurfaces with Sensitivity down to a Single Nanoantenna. NANO LETTERS 19(2), p. 1242 - 9, doi: 10.1021/acs.nanolett.8b04776; FULL TEXT
  (EVAPORATOR, MIRA-EBL, VERIOS)
• Vančík, S., 2018: MEMS microhotplate platform for chemical sensors. MASTER´S THESIS , p. 1 - 68
  (DWL, ALD, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SUSS-MA8, DEKTAK, MPS150, RIE-CHLORINE)
• SVATOŠ, V.; GABLECH, I.; ILIC, B; PEKÁREK, J.; NEUŽIL, P., 2018: In situ observation of carbon nanotube layer growth on microbolometers with substrates at ambient temperature. JOURNAL OF APPLIED PHYSICS 123(11), p. 114503-1 - 8, doi: 10.1063/1.5016465; FULL TEXT
  (EVAPORATOR, DIENER)
• DHANKHAR, M.; VAŇATKA, M.; URBÁNEK, M., 2018: Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques. JOURNAL OF VISUALIZED EXPERIMENTS : JOVE (137), p. 1 - 7, doi: 10.3791/57817; FULL TEXT
  (MIRA-EBL, EVAPORATOR, TITAN, KAUFMAN)
• STARÁ, V.; PROCHÁZKA, P.; MAREČEK, D.; ŠIKOLA, T.; ČECHAL, J., 2018: Ambipolar remote graphene doping by low-energy electron beam irradiation. NANOSCALE 10(37), p. 17520 - 5, doi: 10.1039/c8nr06483k; FULL TEXT
  (ALD, DIENER, DWL, EVAPORATOR)
• Procházka, P., 2018: Fabrication of graphene and study of its physical properties. PH.D. THESIS , p. 1 - 139
  (ALD, DIENER, EVAPORATOR, MIRA-EBL, PECVD, TERS, WIRE-BONDER)
• Křižáková, V., 2018: Spin wave excitation and propagation in magnonic crystals prepared by focused ion beam direct writing. MASTER´S THESIS , p. 1 - 83
  (HELIOS, MIRA-EBL, EVAPORATOR, WIRE-BONDER, KERR-MICROSCOPE, LYRA, ICON-SPM)
• Dvořák, P., 2018: Nanophotonics. PH.D. THESIS , p. 1 - 134
  (SNOM-NANONICS, TERS, EVAPORATOR, FTIR, WOOLLAM-VIS, LYRA)
• HORÁK, M.; BUKVIŠOVÁ, K.; ŠVARC, V.; JASKOWIEC, J.; KŘÁPEK, V.; ŠIKOLA, T., 2018: Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography. SCIENTIFIC REPORTS 8(1), p. 9640 - 8, doi: 10.1038/s41598-018-28037-1; FULL TEXT
  (TITAN, HELIOS, MIRA-EBL, EVAPORATOR, ICON-SPM)
• Rovenská, K., 2018: Metallic nanostructures with three-dimensional topography for plasmonics. BACHELOR THESIS , p. 1 - 45
  (MIRA-EBL, EVAPORATOR, FTIR)
• Schánilec, V., 2018: Magnetic spin ice states in artificial magnetic frustrated systems. MASTER´S THESIS , p. 1 - 46
  (RAITH, EVAPORATOR, VERIOS, ICON-SPM)
• HAVRANOVÁ, P.; ŠEBEST, P.; LIGMAJER, F.; FOJTA, M.; DAŇHEL, A., 2018: Preparation and Characterization of Silver Amalgam Particles on Gold Electrode Surface. PROCEEDINGS OF THE INTERNATIONAL CONFERENCE MODERN ELECTROCHEMICAL METHODS XXXVIII , p. 70 - 4; FULL TEXT
  (VERIOS, EVAPORATOR)
• Holobrádek, J., 2017: Transport Properties of One Magnetic Nanostructures. BACHELOR´S THESIS , p. 1 - 48
  (TITAN, MIRA-EBL, EVAPORATOR, WIRE-BONDER, CRYOGENIC, ICON-SPM)
• Turčan, I., 2017: Study of Magnonic Crystals in a Frequency Domain. MASTER´S THESIS , p. 1 - 55
  (MIRA-EBL, EVAPORATOR, MAGNETRON, WIRE-BONDER)
• VAŇATKA, M.; URBÁNEK, M.; JÍRA, R.; FLAJŠMAN, L.; DHANKHAR, M.; IM, M.; MICHALIČKA, J.; UHLÍŘ, V.; ŠIKOLA, T., 2017: Magnetic vortex nucleation modes in static magnetic fields. AIP ADVANCES 7(10), p. 1 - 8, doi: 10.1063/1.5006235; FULL TEXT
  (DWL, EVAPORATOR, RAITH, TITAN, WIRE-BONDER)
• DVOŘÁK, P.; ÉDES, Z.; KVAPIL, M.; ŠAMOŘIL, T.; LIGMAJER, F.; HRTOŇ, M.; KALOUSEK, R.; KŘÁPEK, V.; DUB, P.; SPOUSTA, J.; VARGA, P.; ŠIKOLA, T., 2017: Imaging of near-field interference patterns by a-SNOM – influence of illumination wavelength and polarization state. OPTICS EXPRESS 25(14), p. 16560 - 13, doi: 10.1364/OE.25.016560; FULL TEXT
  (EVAPORATOR, SNOM-NANONICS, LYRA)
• BABOCKÝ, J.; KŘÍŽOVÁ, A.; ŠTRBKOVÁ, L.; KEJÍK, L.; LIGMAJER, F.; HRTOŇ, M.; DVOŘÁK, P.; TÝČ, M.; ČOLLÁKOVÁ, J.; KŘÁPEK, V.; KALOUSEK, R.; CHMELÍK, R.; ŠIKOLA, T., 2017: Quantitative 3D phase imaging of plasmonic metasurfaces. ACS PHOTONICS 4(6), p. 1389 - 9, doi: 10.1021/acsphotonics.7b00022; FULL TEXT
  (MIRA-EBL, EVAPORATOR, LYRA)
• Citterberg, D., 2017: Preparation of contacts to one-dimensional nanostructurs. BACHELOR´S THESIS , p. 1 - 26
  (DWL, MIRA-EBL, WIRE-BONDER, EVAPORATOR)
• Vaňatka, M., 2017: Fabrication and characterization of nanostructures with functional properties in the field of spintronics. TREATISE TO STATE DOCTORAL EXAM , p. 1 - 31
  (TITAN, MIRA-EBL, EVAPORATOR, MAGNETRON, WIRE-BONDER, LYRA)
• Pekárek, J.; Prokop, R.; Svatoš, V.; Gablech, I.; Hubálek, J.; Neužil, P., 2017: Self-compensating method for bolometer–based IR focal plane arrays. SENSORS AND ACTUATORS, A: PHYSICAL 265, p. 40 - 46, doi: 10.1016/j.sna.2017.08.025
  (SUSS-MA8, EVAPORATOR, RIE-FLUORINE, SUMMIT, SCIA)
• MACH, J.; PROCHÁZKA, P.; BARTOŠÍK, M.; NEZVAL, D.; PIASTEK, J.; HULVA, J.; ŠVARC, V.; KONEČNÝ, M.; KORMOŠ, L.; ŠIKOLA, T., 2017: Electronic transport properties of graphene doped by gallium. NANOTECHNOLOGY 28(41), p. 1 - 10, doi: 10.1088/1361-6528/aa86a4; FULL TEXT
  (DIENER, DWL, EVAPORATOR, WIRE-BONDER, LYRA)
• Fabianová, K., 2016: Fabrication of well defined nanoporous structures with application in membrane sensing. BACHELOR’S THESIS , p. 1 - 54
  (PECVD, MIRA-EBL, RIE-FLUORINE, NANOCALC, MAGNETRON, EVAPORATOR, LYRA)
• Lišková, Z., 2015: Fabrication of Nanostructures and Nanodevices for Nanoelectronics and Spintronics. PH.D. THESIS , p. 1 - 106
  (MIRA-EBL, DIENER, NANOCALC, DWL, EVAPORATOR, WIRE-BONDER, ALD, LYRA)

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