Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660 (HELIOS)


Guarantor: Ondřej Man, Ph.D.
Instrument status: Operational Operational, 25.2.2019 12:11, Worn aperture strip still in place!
Equipment placement: CEITEC Nano - A1.10
Research group: CF: CEITEC Nano

Detailed description:

FIB/SEM with sub-nm resolution, capable of imaging at very low landing energies of primary electrons (of the order of tens of volts), in-lens detection of SE and BSE, local chemical analysis. Equipped with STEM detector and EDS + EBSD analysers. Ideally suited for TEM lamella preparation and observation. Capable of 3D chemical and crystallographic analysis as well as structure reconstruction.


  • Daniel, R.; Meindlhumer, M.; Baumegger, W.; Todt, J.; Zalesak, J.; Ziegelwanger, T.; Mitterer, C.; Keckes, J., 2019: Anisotropy of fracture toughness in nanostructured ceramics controlled by grain boundary design. MATERIALS AND DESIGN 161, p. 80 - 85, doi: 10.1016/j.matdes.2018.11.028
  • Gruber, D. P.; Todt, J.; Wöhrl, N.; Zalesak, J.; Tkadletz, M.; Kubec, A.; Niese, S.; Burghammer, M.; Rosenthal, M.; Sternschulte, H.; Pfeifenberger, M. J.; Sartory, B.; Keckes, J., 2019: Gradients of microstructure, stresses and mechanical properties in a multi-layered diamond thin film revealed by correlative cross-sectional nano-analytics. CARBON 144, p. 666 - 674, doi: 10.1016/j.carbon.2018.12.093
  • Horák, M.; Křápek, V.; Hrtoň, M.; Konečná, A.; Ligmajer, F.; Stöger-Pollach, M.; Šamořil, T.; Paták, A.; Édes, Z.; Metelka, O.; Babocký, J.; Šikola, T., 2019: Limits of Babinet’s principle for solid and hollow plasmonic antennas. SCIENTIFIC REPORTS 9(1), p. 4004-1 - 4004-11, doi: 10.1038/s41598-019-40500-1
  • Stöger-Pollach, M.; Bukvišová, K.; Schwarz, S.; Kvapil, M.; Šamořil, T.; Horák, M., 2019: Fundamentals of cathodoluminescence in a STEM: The impact of sample geometry and electron beam energy on light emission of semiconductors. ULTRAMICROSCOPY 200, p. 111 - 124, doi: 10.1016/j.ultramic.2019.03.001
  • Hudec, T.; Mikula, M.; Satrapinskyy, L.; Roch, T.; Truchlý, M.; Švec, P.; Huminiuc, T.; Polcar, T., 2019: Structure, mechanical and tribological properties of Mo-S-N solid lubricant coatings. APPLIED SURFACE SCIENCE 486, p. 1 - 14, doi: 10.1016/j.apsusc.2019.03.294

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