Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660


Location:
CEITEC BUT

Research group:
CF: CEITEC Nano


FIB/SEM with sub-nm resolution, capable of imaging at very low landing energies of primary electrons (of the order of tens of volts), in-lens detection of SE and BSE, local chemical analysis. Equipped with STEM detector and EDS + EBSD analysers. Ideally suited for TEM lamella preparation and observation. Capable of 3D chemical and crystallographic analysis as well as structure reconstruction.


Publications: