Magnetron sputtering system BESTEC (MAGNETRON)

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Guarantor: Jan Prášek, Ph.D.
Technology / Methodology: Etching & Deposition
Instrument status: Operational Operational, 3.10.2025 13:27, Mo(1), Au(2), NbTi(3), Al(4), FeRh(5), W(6), Co(7), Ta(8) + nitrogen
Equipment placement: CEITEC Nano - C1.36
Research group: CF: CEITEC Nano


Description:

The UHV physical vapor deposition system for DC and RF thin-film sputtering deposition (mostly the metals) which utilizes strong electric and magnetic fields to increase the deposition yield. The eight sputtering target system has a reactive gas inlet for reactive deposition of oxides and nitrides as well. The substrate can be heated up to 800 °C.


Publications:

  • Mattern, M.; Zeuschner, SP.; Rössle, M.; Arregi, JA.; Uhlir, V.; Bargheer, M., 2025: Non-thermal electrons open the non-equilibrium pathway of the phase transition in FeRh. COMMUNICATIONS PHYSICS 8(1), doi: 10.1038/s42005-025-02066-5; FULL TEXT
    (MAGNETRON, VERSALAB, RIGAKU9)
  • DODD, S.; GUDINO, N.; ZADOROZHNII, O.; STAŇO, M.; HAJDUČEK, J.; ARREGI URIBEETXEBARRIA, J.; MORRIS, H.; UHLÍŘ, V.; BARBIC, M.; KORETSKY, A., 2025: Field switching of microfabricated metamagnetic FeRh MRI contrast agents. SCIENTIFIC REPORTS 15(1), p. 1 - 10, doi: 10.1038/s41598-025-85384-6; FULL TEXT
    (MAGNETRON, VERSALAB, MIRA-EBL, EVAPORATOR, RIE-FLUORINE, ICON-SPM, KERR-MICROSCOPE)
  • Hrdinová, S., 2024: Influence of the epitaxial strain at the lateral thin film-stripe interface on the Ferromagnetic-Antiferromagnetic phase coexistence in FeRh. BACHELOR´S THESIS , p. 1 - 49; FULL TEXT
    (MAGNETRON, VERSALAB, ICON-SPM)
  • Castellano, A.; Alhada-Lahbabi, K.; Arregi, JA.; Uhlir, V.; Perrin, B.; Gourdon, C.; Fournier, D.; Verstraete, MJ.; Thevenard, L., 2024: Magnetic phase dependency of the thermal conductivity of FeRh from thermoreflectance experiments and numerical simulations. PHYSICAL REVIEW MATERIALS 8(8), doi: 10.1103/PhysRevMaterials.8.084411; FULL TEXT
    (MAGNETRON, VERSALAB, RIGAKU9, WOOLLAM-VIS)
  • OURDANI, D.; CASTELLANO, A.; VYTHELINGUM, A.; ARREGI URIBEETXEBARRIA, J.; UHLÍŘ, V.; PERRIN, B.; BELMEGUENAI, M.; ROUSSIGNÉ, Y.; GOURDON, C.; VERSTRAETE, M.; THEVENARD, L., 2024: Experimental determination of the temperature- and phase-dependent elastic constants of FeRh. PHYSICAL REVIEW B 110(1), doi: 10.1103/PhysRevB.110.014427; FULL TEXT
    (MAGNETRON, VERSALAB)

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