Magnetron sputtering system BESTEC (MAGNETRON)

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Guarantor: Jan Prášek, Ph.D.
Technology / Methodology: Etching & Deposition
Instrument status: Operational Operational, 25.11.2025 10:46, Nb(1), Pt(2), NbTi(3), SiO2(4), FeRh(5), Hf(6), Ni(7), Ta(8) + nitrogen
Equipment placement: CEITEC Nano - C1.36
Research group: CF: CEITEC Nano


Detailed description:

The UHV physical vapor deposition system for DC and RF thin-film sputtering deposition (mostly the metals) which utilizes strong electric and magnetic fields to increase the deposition yield. The eight sputtering target system has a reactive gas inlet for reactive deposition of oxides and nitrides as well. The substrate can be heated up to 800 °C.


Publications:

  • MOZALEV, A.; BENDOVÁ, M.; KALINA, L.; PRÁŠEK, J.; GISPERT-GUIRADO, F.; LLOBET, E., 2025: MoOx-based high-density nanoarrays on a substrate via smart anodizing as novel 3D electrodes for nano-energy applications. JOURNAL OF MATERIALS CHEMISTRY A 13(25), p. 19605 - 18, doi: 10.1039/d5ta02921j; FULL TEXT
    (KRATOS-XPS, MAGNETRON)
  • Horký, M., 2025: Controlling the magnetic phase transition in spatially confined structures. PH.D. THESIS , p. 1 - 181; FULL TEXT
    (RAITH, MIRA-EBL, LYRA, TEGRAMIN, SUSS-MA8, DEKTAK, NANOCALC, MAGNETRON, EVAPORATOR, RIE-FLUORINE, WIRE-BONDER, MPS150, CRYOGENIC, LAKESHORE, VERSALAB, ICON-SPM, UHV-PREPARATION, TITAN, HELIOS, VERIOS, RIGAKU3, RIGAKU9)
  • Mattern, M.; Zeuschner, SP.; Rössle, M.; Arregi, JA.; Uhlir, V.; Bargheer, M., 2025: Non-thermal electrons open the non-equilibrium pathway of the phase transition in FeRh. COMMUNICATIONS PHYSICS 8(1), doi: 10.1038/s42005-025-02066-5; FULL TEXT
    (MAGNETRON, VERSALAB, RIGAKU9)
  • DODD, S.; GUDINO, N.; ZADOROZHNII, O.; STAŇO, M.; HAJDUČEK, J.; ARREGI URIBEETXEBARRIA, J.; MORRIS, H.; UHLÍŘ, V.; BARBIC, M.; KORETSKY, A., 2025: Field switching of microfabricated metamagnetic FeRh MRI contrast agents. SCIENTIFIC REPORTS 15(1), p. 1 - 10, doi: 10.1038/s41598-025-85384-6; FULL TEXT
    (MAGNETRON, VERSALAB, MIRA-EBL, EVAPORATOR, RIE-FLUORINE, ICON-SPM, KERR-MICROSCOPE)
  • Otýpka, M., 2024: Electric-current Control of Magnetic Textures in Synthetic Antiferromagnets. BACHELOR´S THESIS , p. 1 - 56; FULL TEXT
    (MAGNETRON, VERSALAB, DWL, WIRE-BONDER, KERR-MICROSCOPE)

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