Magnetron sputtering system BESTEC (MAGNETRON)

CONTACT US

Guarantor: Jan Prášek, Ph.D.
Technology / Methodology: Etching & Deposition
Instrument status: Operational Operational, 9.5.2024 16:54, Installed targets: Mo(1), Pt(2), CoFeB(3), Pd(4), Ni(5), Mn(6), Ta(7), Fe(8) + oxygen
Equipment placement: CEITEC Nano - C1.36
Research group: CF: CEITEC Nano


Description:

The UHV physical vapor deposition system for DC and RF thin-film sputtering deposition (mostly the metals) which utilizes strong electric and magnetic fields to increase the deposition yield. The eight sputtering target system has a reactive gas inlet for reactive deposition of oxides and nitrides as well. The substrate can be heated up to 800 °C.


Publications:

  • POLAT, Ö.; HORÁK, M.; ARREGI URIBEETXEBARRIA, J.; BUKVIŠOVÁ, K.; ZLÁMAL, J.; ŠIKOLA, T., 2023: Synthesis and characterization of half-Heusler ScPtBi films via three-source magnetron co-sputtering on Nb superconductor buffer layer. SURFACES AND INTERFACES 40, doi: 10.1016/j.surfin.2023.103118; FULL TEXT
    (MAGNETRON, RIGAKU9, TITAN, HELIOS, KRATOS-XPS, CRYOGENIC, LYRA)
  • HORÁK, M.; KONEČNÁ, A.; ŠIKOLA, T.; KŘÁPEK, V., 2023: Spatio-spectral metrics in electron energy loss spectroscopy as a tool to resolve nearly degenerate plasmon modes in dimer plasmonic antennas. NANOPHOTONICS 12(15), p. 3089 - 10, doi: 10.1515/nanoph-2023-0153; FULL TEXT
    (MAGNETRON, HELIOS, TITAN)
  • MOTYČKOVÁ, L.; ARREGI URIBEETXEBARRIA, J.; STAŇO, M.; PRŮŠA, S.; ČÁSTKOVÁ, K.; UHLÍŘ, V., 2023: Preserving Metamagnetism in Self-Assembled FeRh Nanomagnets. ACS APPLIED MATERIALS & INTERFACES 15(6), p. 8653 - 13, doi: 10.1021/acsami.2c20107; FULL TEXT
    (MAGNETRON, VERSALAB, RIGAKU9, UHV-LEIS, VERIOS, ICON-SPM)
  • KAMNEV, K.; PYTLÍČEK, Z.; BENDOVÁ, M.; PRÁŠEK, J.; GISPERT-GUIRADO, F.; LLOBET, E.; MOZALEV, A., 2023: The planar anodic Al2O3-ZrO2 nanocomposite capacitor dielectrics for advanced passive device integration. SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS 24(1), p. 1 - 17, doi: 10.1080/14686996.2022.2162324; FULL TEXT
    (MAGNETRON, SUSS-MA8, SUSS-RCD8, VERIOS, KRATOS-XPS, MPS150)
  • WOJEWODA, O.; LIGMAJER, F.; HRTOŇ, M.; KLÍMA, J.; DHANKHAR, M.; DAVÍDKOVÁ, K.; STAŇO, M.; HOLOBRÁDEK, J.; KRČMA, J.; ZLÁMAL, J.; ŠIKOLA, T.; URBÁNEK, M., 2023: Observing high-k magnons with Mie-resonance-enhanced Brillouin light scattering. COMMUNICATIONS PHYSICS 6(1), p. 1 - 10, doi: 10.1038/s42005-023-01214-z; FULL TEXT
    (RAITH, MIRA-EBL, EVAPORATOR, MAGNETRON, ALD, LYRA, ICON-SPM, BRILLOUIN)

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