Magnetron sputtering system BESTEC (MAGNETRON)

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Guarantor: Marek Eliáš, Ph.D.
Technology / Methodology: Etching & Deposition
Instrument status: Operational Operational, 23.10.2019 11:59
Equipment placement: CEITEC Nano - C1.36
Research group: CF: CEITEC Nano


Detailed description:

The system consists of a sputter deposition chamber with 8 magnetrons in sputter up configuration. The lid flange of the sputtering chamber is sealed with double viton o- rings and differentially pumped.
For the chamber we use turbomolecular pumps with scroll foreline pump. For good end pressure a Ti- sublimation pump is also included. With the pumping configuration it is possible to reach the base pressure of 3x 10-9 mbar with bake out of the clean chamber. The gas inlet in the process chambers is realized with mass flow controllers. For sputter gas Ar we use a 50sccm range device and for O2 and N2 a 10sccm device is used. Pressure regulation is done by up stream process using a three stage valve over the turbo pump. The substrates max. 4” in diameter or several smaller substráte pieces can be mounted on different sample holders from molybdenum (totally 2 in the scope of supply).
There is a manually sample transfer foreseen into and out of the process chamber.
In the process chamber the sample can be heated to 850°C with radiation heating. The sample stage is thermal shielded and water cooled to prevent from heating up. The substrate can rotate motorized with max. 30 rpm.


Publications:

  • Horák, M.; Křápek, V.; Hrtoň, M.; Konečná, A.; Ligmajer, F.; Stöger-Pollach, M.; Šamořil, T.; Paták, A.; Édes, Z.; Metelka, O.; Babocký, J.; Šikola, T., 2019: Limits of Babinet’s principle for solid and hollow plasmonic antennas. SCIENTIFIC REPORTS 9(1), p. 4004-1 - 4004-11, doi: 10.1038/s41598-019-40500-1
    (TITAN, HELIOS, LYRA, MAGNETRON, FTIR, SNOM-NANONICS)
  • Michlíček, M.; Manakhov, A.; Dvořáková, E.; Zajíčková, L., 2019: Homogeneity and penetration depth of atmospheric pressure plasma polymerization onto electrospun nanofibrous mats. APPLIED SURFACE SCIENCE 471, p. 835 - 841, doi: 10.1016/j.apsusc.2018.11.148
    (LYRA, MAGNETRON, FTIR, KRATOS-XPS)
  • Hajduček, J., 2019: Substrate-controlled nucleation of the magnetic phase transtition in nanostructures. BACHELOR´S THESIS , p. 1 - 46
    (MAGNETRON, ICON-SPM, CRYOGENIC, MIRA, RIE-FLUORINE, EVAPORATOR)
  • Motyčková, L., 2018: Epitaxial growth and characterization of metamagnetic nanoparticles for biomedical applications. BACHELOR´S THESIS , p. 1 - 55
    (MAGNETRON, ICON-SPM, LYRA, CRYOGENIC)
  • Vančík, S., 2018: MEMS microhotplate platform for chemical sensors. MASTER´S THESIS , p. 1 - 68
    (DWL, ALD, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SUSS-MA8, DEKTAK, MPS150, RIE-CHLORINE)

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