Mechanical profilometer Bruker Dektak XT (DEKTAK)

Profile card (PDF)

Detailed description:

The DektakXT® stylus surface profiler is an advanced thin and thick film step height measurement tool. In addition to profiling surface topography and waviness, the DektakXT system measures roughness in the nanometer range. Available with a standard manual sample-positioning stage or an optional automatic X-Y or theta stage, it provides step-height repeatability of 5Å (<0.6 nm).
In addition to taking two-dimensional surface profile measurements, the DektakXT system can produce three-dimensional measurements and analyses when equipped with the 3D Mapping Option. With the N-Lite+ Option, it can allow low-force stylus engagement and scanning, optimized to protect force-sensitive samples.

Publications:

• Horký, M., 2025: Controlling the magnetic phase transition in spatially confined structures. PH.D. THESIS , p. 1 - 181; FULL TEXT
  (RAITH, MIRA-EBL, LYRA, TEGRAMIN, SUSS-MA8, DEKTAK, NANOCALC, MAGNETRON, EVAPORATOR, RIE-FLUORINE, WIRE-BONDER, MPS150, CRYOGENIC, LAKESHORE, VERSALAB, ICON-SPM, UHV-PREPARATION, TITAN, HELIOS, VERIOS, RIGAKU3, RIGAKU9)
• JANŮŠOVÁ, M.; NEČAS, D.; NAVASCUES, P.; HEGEMANN, D.; GAVRANOVIĆ, S.; ZAJÍČKOVÁ, L., 2025: Insight into plasma polymerization with a significant contribution of etching to the deposition process. SURFACE & COATINGS TECHNOLOGY 503, doi: 10.1016/j.surfcoat.2025.131962; FULL TEXT
  (KRATOS-XPS, DEKTAK, WOOLLAM-VIS)
• Koňařík, L., 2024: Development and fabrication of microelectromechanical systems MEMS. BACHELOR´S THESIS , p. 1 - 46; FULL TEXT
  (LASER-DICER, DWL, EVAPORATOR, RIE-FLUORINE, DRIE, NANOCALC, DEKTAK, WIRE-BONDER, LYRA)
• Mouralova, K.; Fries, J.; Benes, L.; Houska, P., 2024: Materials That Do Not Form Any Defects After WEDM. PROCESSES 12(11), doi: 10.3390/pr12112448; FULL TEXT
  (DEKTAK, LYRA, TEGRAMIN)
• RONOH, K.; NOVOTNÝ, J.; MRŇA, L.; KNÁPEK, A.; SOBOLA, D., 2024: Ablation characteristics of the nickel-based superalloy, 699 XA using ultrafast laser. APPLIED SURFACE SCIENCE , doi: 10.1016/j.apsusc.2024.161687; FULL TEXT
  (WITEC-RAMAN, KRATOS-XPS, VERIOS, MIRA-STAN, DEKTAK)

• GRYSZEL, M.; JAKEŠOVÁ, M.; VU, X.; INGEBRANDT, S.; GLOWACKI, E., 2024: Elevating Platinum to Volumetric Capacitance: High Surface Area Electrodes through Reactive Pt Sputtering. ADVANCED HEALTHCARE MATERIALS , doi: 10.1002/adhm.202302400; FULL TEXT
  (EVAPORATOR, DEKTAK, RIE-FLUORINE, DWL, SUSS-MA8)
• Mouralova, K.; Benes, L.; Fries, J., 2024: Comparison of MRR of different WEDM-machined materials. THE INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY 132(9-10), p. 4461 - 4471, doi: 10.1007/s00170-024-13631-7; FULL TEXT
  (TEGRAMIN, LYRA, DEKTAK)
• RONOH, K.; NOVOTNÝ, J.; MRŇA, L.; KNÁPEK, A.; SOBOLA, D., 2024: Surface Structuring of the CP Titanium by Ultrafast Laser Pulses. MATERIALS RESEARCH EXPRESS 14(8), p. 1 - 21, doi: 10.3390/app14083164; FULL TEXT
  (MIRA-STAN, WITEC-RAMAN, SEE-SYSTEM, DEKTAK)
• RONOH, K.; NOVOTNÝ, J.; MRŇA, L.; KNÁPEK, A.; SOBOLA, D., 2024: Effects of laser and scanning parameters on surface modification of MONEL ® alloy 400 by picosecond laser . OPTICS AND LASER TECHNOLOGY 172, p. 1 - 19, doi: 10.1016/j.optlastec.2023.110514; FULL TEXT
  (TEGRAMIN, VERIOS, DEKTAK)
• RONOH, K.; NOVOTNÝ, J.; MRŇA, L.; KNÁPEK, A.; SOBOLA, D., 2024: Analysis of processing efficiency, surface, and bulk chemistry, and nanomechanical properties of the Monel® alloy 400 after ultrashort pulsed laser ablation. MATERIALS RESEARCH EXPRESS 11(1), doi: 10.1088/2053-1591/ad184b; FULL TEXT
  (DEKTAK, MIRA-STAN, KRATOS-XPS, NANOINDENTER)
• Mahel, V., 2023: Variable MEMS aperture for electron microscopy. MASTER´S THESIS ; FULL TEXT
  (DWL, DRIE, DEKTAK, DIENER, WIRE-BONDER)
• Mouralova, K.; Bednar, J.; Benes, L.; Prokes, T.; Zahradnicek, R.; Fries, J., 2023: Mathematical Models for Machining Optimization of Ampcoloy 35 with Different Thicknesses Using WEDM to Improve the Surface Properties of Mold Parts. MATERIALS 16(1), doi: 10.3390/ma16010100; FULL TEXT
  (TEGRAMIN, DEKTAK, LYRA)
• Benes, L.; Mouralova, K.; Midula, P.; Snow, J.; Lysonkova, I.; Pilnaj, D.; Burdova, H.; Prokes, T.; Zahradnicek, R.; Fries, J.; Kuráň, P.; Kubenka, M., 2023: The Corrosion Behavior of WEDM Machined Stainless Steels in a Pyrolysis Environment. METALS 13(1), doi: 10.3390/met13010144; FULL TEXT
  (DEKTAK, TEGRAMIN, LYRA)
• Mouralova, K.; Benes, L.; Prokes, T.; Zahradnicek, R.; Fries, J.; Plichta, T., 2023: Analysis of the machinability of different types of sintered carbides with WEDM in both water and oil baths. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY 125(5-6), p. 2705 - 2715, doi: 10.1007/s00170-023-10913-4; FULL TEXT
  (DEKTAK, LYRA)
• GALLINA, P.; KVAPIL, M.; LIŠKA, J.; KONEČNÁ, A.; KŘÁPEK, V.; KALOUSEK, R.; ZLÁMAL, J.; ŠIKOLA, T., 2023: Strong coupling in an Au plasmonic antenna-SiO2 layer system: A hybrid-mode analysis. PHYSICAL REVIEW B 107(12), p. 125144 - 6, doi: 10.1103/PhysRevB.107.125144; FULL TEXT
  (ALD-FIJI, EVAPORATOR, MIRA-EBL, FTIR, NANOCALC, DEKTAK, WOOLLAM-MIR, ICON-SPM)
• POUCHLÝ, V.; TALIMIAN, A.; KAŠTYL, J.; CHVÍLA, M.; ŠČASNOVIČ, E.; BELTRAN, A.; LOZANO, J.; GALUSEK, D., 2023: Transparent LiOH-doped magnesium aluminate spinel produced by spark plasma sintering: Effects of heating rate and dopant concentration. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 43(8), p. 3544 - 9, doi: 10.1016/j.jeurceramsoc.2023.01.059; FULL TEXT
  (DEKTAK)
• Mouralova, K.; Bednar, J.; Benes, L.; Polzer, A.; Zahradnicek, R.; Fries, J.; Prokes, T., 2023: Machining of 1.2363 and 1.2343ESR steels using EDM. JOURNAL OF THE BRAZILIAN SOCIETY OF MECHANICAL SCIENCES AND ENGINEERING 45(7), doi: 10.1007/s40430-023-04293-9; FULL TEXT
  (DEKTAK, LYRA, TITAN, HELIOS, TEGRAMIN)
• BRODSKÝ, J.; GABLECH, I.; MIGLIACCIO, L.; HAVLÍČEK, M.; DONAHUE, M.; GLOWACKI, E., 2023: Downsizing the Channel Length of Vertical Organic Electrochemical Transistors. ACS APPL MATER INTER 15(22), p. 27002 - 8, doi: 10.1021/acsami.3c02049; FULL TEXT
  (SUSS-MA8, EVAPORATOR, SCIA, PARYLENE-SCS, RIE-FLUORINE, MIRA-EBL, DEKTAK, ICON-SPM)
• Jarušek, J., 2022: Sputtering of nitride layers using Kaufman ion-beam source for bioelectronics applications. BACHELOR´S THESIS , p. 1 - 75; FULL TEXT
  (DEKTAK, KAUFMAN, RIE-CHLORINE, NANOCALC, RIGAKU9, KEITHLEY-4200)
• Rybakiewicz-Sekita, R.; Gryszel, M.; Pathak, G.; Ganczarczyk, R.; Donahue, MJ.; Glowacki, ED., 2022: Well-defined electrochemical switching of amphiphilic glycolated poly(3,4-ethylenedioxythiophene). JOURNAL OF MATERIALS CHEMISTRY C 10(15), p. 17208 - 8, doi: 10.1039/d2tc01448c; FULL TEXT
  (DEKTAK)
• Mouralova, K.; Benes, L.; Prokes, T.; Bednar, J.; Zahradnicek, R.; Fries, J., 2022: Analysis of the effect of material thickness during the WEDM processon cutting speed, topography and morphology. PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS, PART B: JOURNAL OF ENGINEERING MANUFACTURE , doi: 10.1177/09544054221136516; FULL TEXT
  (TEGRAMIN, DEKTAK, LYRA)
• KAŠTYL, J.; ŠŤASTNÝ, P.; CHLUP, Z.; SONG, L.; ŠČASNOVIČ, E.; TRUNEC, M., 2022: Gelcast zirconia ceramics for dental applications combining high strength and high translucency. JOURNAL OF THE AMERICAN CERAMIC SOCIETY 105(6), p. 3909 - 16, doi: 10.1111/jace.18417; FULL TEXT
  (VERIOS, TITAN, HELIOS, RIGAKU3, DEKTAK, WITEC-RAMAN)
• Polzer, A.; Mouralova, K.; Benes, L.; Zahradnicek, R.; Fries, J., 2022: Comparison of machinability of nickel alloys using WEDM. PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS, PART B: JOURNAL OF ENGINEERING MANUFACTURE , doi: 10.1177/09544054221075876; FULL TEXT
  (TEGRAMIN, DEKTAK, HELIOS, TITAN, LYRA)
• REDONDO NEGRETE, E.; PUMERA, M., 2021: Fully metallic copper 3D-printed electrodes via sintering for electrocatalytic biosensing. APPLIED MATERIALS TODAY 25, p. 101253-1 - 6, doi: 10.1016/j.apmt.2021.101253; FULL TEXT
  (DEKTAK, VERIOS, KRATOS-XPS, WITEC-RAMAN)
• Mouralova, K.; Polzer, A.; Benes, L.; Bednar, J.; Zahradnicek, R.; Kalivoda, M.; Fries, J., 2021: Multicut technology used in WEDM machining of Mar-M247. PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS, PART B: JOURNAL OF ENGINEERING MANUFACTURE , doi: 10.1177/09544054211043484; FULL TEXT
  (DEKTAK, TEGRAMIN, HELIOS, TITAN, LYRA)
• Kepič, P., 2021: Design and fabrication of tunable dielectric metasurfaces for visible and infrared wavelengths. MASTER´S THESIS , p. 1 - 76; FULL TEXT
  (MIRA-EBL, EVAPORATOR, DEKTAK, WITEC-RAMAN, KRATOS-XPS, SNOM-NANONICS, LYRA, ICON-SPM)
• Mouralova, K.; Polzer, A.; Benes, L.; Bednar, J.; Zahradnicek, R.; Prokes, T.; Fiala, Z.; Fries, J., 2021: Machining of B1914 nickel-based superalloy using wire electrical discharge machining. PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS, PART E: JOURNAL OF PROCESS MECHANICAL ENGINEERING , doi: 10.1177/09544089211031746; FULL TEXT
  (TEGRAMIN, DEKTAK, HELIOS, TITAN, LYRA)
• Mouralova, K.; Benes, L.; Zahradnicek, R.; Bednar, J.; Zadera, A.; Fries, J.; Kana, V., 2020: WEDM used for machining high entropy alloys. MATERIALS 13(21), p. 4823-1 - 4823-20, doi: 10.3390/ma13214823
  (TEGRAMIN, DEKTAK, HELIOS, TITAN, LYRA)
• KAŠTYL, J.; CHLUP, Z.; ŠŤASTNÝ, P.; TRUNEC, M., 2020: Machinability and properties of zirconia ceramics prepared by gelcasting method. ADVANCES IN APPLIED CERAMICS 119(5-6), p. 252 - 9, doi: 10.1080/17436753.2019.1675402; FULL TEXT
  (DEKTAK, VERIOS)
• ŠŤASTNÝ, P.; CHLUP, Z.; TRUNEC, M., 2020: Gel-tape casting as a novel method for the production of flexible fine-grained alumina sheets. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 40(7), p. 2542 - 6, doi: 10.1016/j.jeurceramsoc.2019.10.042; FULL TEXT
  (VERIOS, DEKTAK)
• Mouralova, K.; Benes, L.; Bednar, J.; Zahradnicek, R.; Prokes, T.; Fiala, Z.; Fries, J., 2020: Precision Machining of Nimonic C 263 Super AlloyUsing WEDM. COATINGS, MDPI 10(6), p. 590-1 - 590-20, doi: 10.3390/coatings10060590
  (TEGRAMIN, TITAN, DEKTAK, HELIOS, LYRA)
• Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS , p. 1 - 199
  (ALD-FIJI, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, NANOCALC, MPS150, WIRE-BONDER, ICON-SPM)
• Rovenská, K., 2020: Dielectric metasurfaces as modern optical components. MASTER´S THESIS , p. 1 - 57
  (MAGNETRON, DEKTAK, KRATOS-XPS, MIRA-EBL, EVAPORATOR, VERIOS, RIE-FLUORINE, ALD-FIJI)
• Mouralova, K.; Bednar, J.; Benes, L.; Hrabec, P.; Kalivoda, M.; Fries, J., 2020: The analysis of EDM electrodes wear in corners and edges. ARCHIVES OF CIVIL AND MECHANICAL ENGINEERING 20(4), p. 130-1 - 130-14, doi: 10.1007/s43452-020-00137-8
  (DEKTAK, LYRA)
• Habovštiaková, M., 2020: Electroerosion wire cutting of technical ceramics. MASTER´S THESIS , p. 1 - 83
  (DEKTAK, LYRA)
• Kudrna, T., 2020: Electroerosive sinking of technical ceramics. MASTER´S THESIS , p. 1 - 88
  (DEKTAK, LYRA)
• Zubáková, A., 2020: Electroerosion machining of materials used in the aerospace industry. MASTER´S THESIS , p. 1 - 62
  (DEKTAK, LYRA)
• Líkař, M., 2020: Experimental electroerosion machining of special materials for aerospace industry. MASTER´S THESIS , p. 1 - 62
  (DEKTAK, LYRA)
• Macháčová, V., 2020: Analysis of results from experimental electrodischarge sinking of special materials for aerospace industry. MATER´S THESIS , p. 1 - 64
  (DEKTAK, TEGRAMIN, LYRA)
• KEJÍK, L.; HORÁK, M.; ŠIKOLA, T.; KŘÁPEK, V., 2020: Structural and optical properties of monocrystalline and polycrystalline gold plasmonic nanorods. OPTICS EXPRESS 28(23), p. 34960 - 13, doi: 10.1364/OE.409428; FULL TEXT
  (HELIOS, TITAN, LEICACOAT-STAN, DEKTAK, ICON-SPM)
• Richter, V., 2019: Utilization of reduction plasma for surface treatments of nanostructured materials. MASTER´S THESIS , p. 1 - 52
  (DEKTAK, KRATOS-XPS)
• Kunc, J.; Rejhon, M.; Dědič, V.; Bábor, P., 2019: Thickness of sublimation grown SiC layers measured by scanning Raman spectroscopy. JOURNAL OF ALLOYS AND COMPOUNDS 789, p. 607 - 612, doi: 10.1016/j.jallcom.2019.02.305
  (DEKTAK, SIMS)
• Vančík, S., 2018: MEMS microhotplate platform for chemical sensors. MASTER´S THESIS , p. 1 - 68
  (DWL, ALD-FIJI, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SUSS-MA8, DEKTAK, MPS150, RIE-CHLORINE)
• ŠIK, O.; ŠKVARENINA, Ľ.; CAHA, O.; MORAVEC, P.; ŠKARVADA, P.; BELAS, E.; GRMELA, L., 2018: Determining the sub-surface damage of CdTe single crystals after lapping. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS 29(11), p. 9652 - 10, doi: 10.1007/s10854-018-9002-7; FULL TEXT
  (RIGAKU9, HELIOS, DEKTAK)
• MANAKHOV, A.; LANDOVÁ, M.; MEDALOVÁ, J.; MICHLÍČEK, M.; POLČÁK, J.; NEČAS, D.; ZAJÍČKOVÁ, L., 2017: Cyclopropylamine plasma polymers for increased cell adhesion and growth. PLASMA PROCESSES AND POLYMERS 14(7), p. e1600123-1 - 12, doi: 10.1002/ppap.201600123; FULL TEXT
  (DEKTAK, LYRA, ICON-SPM, R2-PECVD)
• Knotek, M., 2015: Selective growth of GaN nanostructures on silicon substrates. MASTER´S THESIS , p. 1 - 68
  (DEKTAK, LYRA, ICON-SPM)
• Manakhov, A; Zajickova, L; Elias, M; Cechal, J; Polcak, J; Hnilica, J; Bittnerova, S; Necas, D, 2014: Optimization of Cyclopropylamine Plasma Polymerization toward Enhanced Layer Stability in Contact with Water. PLASMA PROCESSES AND POLYMERS 11(6), p. 532 - 544, doi: 10.1002/ppap.201300177
  (FTIR, DEKTAK, LYRA)

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