Mechanical profilometer Bruker Dektak XT (DEKTAK)

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Guarantor: Vojtěch Švarc, Ph.D.
Technology / Methodology: Nanolitography infrastructure
Instrument status: Operational Operational, 9.10.2023 13:11
Equipment placement: CEITEC Nano - C1.30
Research group: CF: CEITEC Nano


Description:

The DektakXT® stylus surface profiler is an advanced thin and thick film step height measurement tool. In addition to profiling surface topography and waviness, the DektakXT system measures roughness in the nanometer range. Available with a standard manual sample-positioning stage or an optional automatic X-Y or theta stage, it provides step-height repeatability of 5Å (<0.6 nm).
In addition to taking two-dimensional surface profile measurements, the DektakXT system can produce three-dimensional measurements and analyses when equipped with the 3D Mapping Option. With the N-Lite+ Option, it can allow low-force stylus engagement and scanning, optimized to protect force-sensitive samples.


Publications:

  • Mouralova, K.; Fries, J.; Benes, L.; Houska, P., 2024: Materials That Do Not Form Any Defects After WEDM. PROCESSES 12(11), doi: 10.3390/pr12112448; FULL TEXT
    (DEKTAK, LYRA, TEGRAMIN)
  • RONOH, K.; NOVOTNÝ, J.; MRŇA, L.; KNÁPEK, A.; SOBOLA, D., 2024: Ablation characteristics of the nickel-based superalloy, 699 XA using ultrafast laser. APPLIED SURFACE SCIENCE , doi: 10.1016/j.apsusc.2024.161687; FULL TEXT
    (WITEC-RAMAN, KRATOS-XPS, VERIOS, MIRA-STAN, DEKTAK)
  • GRYSZEL, M.; JAKEŠOVÁ, M.; VU, X.; INGEBRANDT, S.; GLOWACKI, E., 2024: Elevating Platinum to Volumetric Capacitance: High Surface Area Electrodes through Reactive Pt Sputtering. ADVANCED HEALTHCARE MATERIALS , doi: 10.1002/adhm.202302400; FULL TEXT
    (EVAPORATOR, DEKTAK, RIE-FLUORINE, DWL, SUSS-MA8)
  • Mouralova, K.; Benes, L.; Fries, J., 2024: Comparison of MRR of different WEDM-machined materials. THE INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY 132(9-10), p. 4461 - 4471, doi: 10.1007/s00170-024-13631-7; FULL TEXT
    (TEGRAMIN, LYRA, DEKTAK)
  • RONOH, K.; NOVOTNÝ, J.; MRŇA, L.; KNÁPEK, A.; SOBOLA, D., 2024: Surface Structuring of the CP Titanium by Ultrafast Laser Pulses. MATERIALS RESEARCH EXPRESS 14(8), p. 1 - 21, doi: 10.3390/app14083164; FULL TEXT
    (MIRA-STAN, WITEC-RAMAN, SEE-SYSTEM, DEKTAK)

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