Mechanical profilometer Bruker Dektak XT (DEKTAK)

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Guarantor: Meena Dhankhar
Technology / Methodology: Nanolitography infrastructure
Instrument status: Operational Operational, 9.2.2018 16:39
Equipment placement: CEITEC Nano - C1.30
Research group: CF: CEITEC Nano


Detailed description:

The DektakXT® stylus surface profiler is an advanced thin and thick film step height measurement tool. In addition to profiling surface topography and waviness, the DektakXT system measures roughness in the nanometer range. Available with a standard manual sample-positioning stage or an optional automatic X-Y or theta stage, it provides a step-height repeatability of 5Å (<0.6 nm).
In addition to taking two-dimensional surface profile measurements, the DektakXT system can produce three-dimensional measurements and analyses when equipped with the 3D Mapping Option. With the N-Lite+ Option, it can allow low-force stylus engagement and scanning, optimized to protect force-sensitive samples.


Publications:

  • Stastny, P.; Chlup, Z.; Trunec, M., 2020: Gel-tape casting as a novel method for the production of flexible fine-grained alumina sheets. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 40(7), p. 2542 - 2547, doi: 10.1016/j.jeurceramsoc.2019.10.042
    (VERIOS, DEKTAK)
  • Mouralova, K.; Benes, L.; Bednar, J.; Zahradnicek, R.; Prokes, T.; Fiala, Z.; Fries, J., 2020: Precision Machining of Nimonic C 263 Super AlloyUsing WEDM. COATINGS 10(6), p. 590-1 - 590-20, doi: 10.3390/coatings10060590
    (LYRA, TEGRAMIN, TITAN, DEKTAK, HELIOS)
  • Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS , p. 1 - 199
    (ALD, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, ICON-SPM, NANOCALC, MPS150, WIRE-BONDER)
  • Kunc, J.; Rejhon, M.; Dědič, V.; Bábor, P., 2019: Thickness of sublimation grown SiC layers measured by scanning Raman spectroscopy. JOURNAL OF ALLOYS AND COMPOUNDS 789, p. 607 - 612, doi: 10.1016/j.jallcom.2019.02.305
    (DEKTAK, SIMS)
  • Kastyl, J.; Chlup, Z.; Stastny, P.; Trunec, M., 2019: Machinability and properties of zirconia ceramics prepared by gelcasting method. ADVANCES IN APPLIED CERAMICS , p. 1 - 9, doi: 10.1080/17436753.2019.1675402
    (DEKTAK, VERIOS)

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