Mechanical profilometer Bruker Dektak XT (DEKTAK)

CONTACT US

Guarantor: Meena Dhankhar
Technology / Methodology: Nanolitography infrastructure
Instrument status: Operational Operational, 9.2.2018 16:39
Equipment placement: CEITEC Nano - C1.30
Research group: CF: CEITEC Nano


Detailed description:

The DektakXT® stylus surface profiler is an advanced thin and thick film step height measurement tool. In addition to profiling surface topography and waviness, the DektakXT system measures roughness in the nanometer range. Available with a standard manual sample-positioning stage or an optional automatic X-Y or theta stage, it provides a step-height repeatability of 5Å (<0.6 nm).
In addition to taking two-dimensional surface profile measurements, the DektakXT system can produce three-dimensional measurements and analyses when equipped with the 3D Mapping Option. With the N-Lite+ Option, it can allow low-force stylus engagement and scanning, optimized to protect force-sensitive samples.


Publications:

  • Mouralova, K.; Bednar, J.; Benes, L.; Hrabec, P.; Kalivoda, M.; Fries, J., 2020: The analysis of EDM electrodes wear in corners and edges. ARCHIVES OF CIVIL AND MECHANICAL ENGINEERING 20(4), p. 130-1 - 130-14, doi: 10.1007/s43452-020-00137-8
    (LYRA, DEKTAK)
  • Habovštiaková, M., 2020: Electroerosion wire cutting of technical ceramics. MASTER´S THESIS , p. 1 - 83
    (LYRA, DEKTAK)
  • Kudrna, T., 2020: Electroerosive sinking of technical ceramics. MASTER´S THESIS , p. 1 - 88
    (LYRA, DEKTAK)
  • Zubáková, A., 2020: Electroerosion machining of materials used in the aerospace industry. MASTER´S THESIS , p. 1 - 62
    (LYRA, DEKTAK)
  • KAŠTYL, J.; CHLUP, Z.; ŠŤASTNÝ, P.; TRUNEC, M, 2020: Machinability and properties of zirconia ceramics prepared by gelcasting method. ADVANCES IN APPLIED CERAMICS 119(5-6), p. 252 - 9, doi: 10.1080/17436753.2019.1675402; FULL TEXT
    (DEKTAK, VERIOS)

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