Mechanical profilometer Bruker Dektak XT (DEKTAK)

Mechanical profilometer Bruker Dektak XT
CONTACT US

Guarantor: Meena Dhankhar
Technology / Methodology: Nanolitography infrastructure
Instrument status: Operational Operational, 9.2.2018 16:39
Equipment placement: CEITEC Nano - C1.30
Research group: CF: CEITEC Nano


Detailed description:

The DektakXT® stylus surface profiler is an advanced thin and thick film step height measurement tool. In addition to profiling surface topography and waviness, the DektakXT system measures roughness in the nanometer range. Available with a standard manual sample-positioning stage or an optional automatic X-Y or theta stage, it provides a step-height repeatability of 5Å (<0.6 nm).
In addition to taking two-dimensional surface profile measurements, the DektakXT system can produce three-dimensional measurements and analyses when equipped with the 3D Mapping Option. With the N-Lite+ Option, it can allow low-force stylus engagement and scanning, optimized to protect force-sensitive samples.


Publications:

  • Kunc, J.; Rejhon, M.; Dědič, V.; Bábor, P., 2019: Thickness of sublimation grown SiC layers measured by scanning Raman spectroscopy. JOURNAL OF ALLOYS AND COMPOUNDS 789, p. 607 - 612, doi: 10.1016/j.jallcom.2019.02.305
    (DEKTAK, SIMS)
  • Vančík, S., 2018: MEMS microhotplate platform for chemical sensors. MASTER´S THESIS , p. 1 - 68
    (DWL, ALD, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SUSS-MA8, DEKTAK, MPS150, RIE-CHLORINE)
  • Šik, O.; Škvarenina, L.; Caha, O.; Moravec, P.; Škarvada, P.; Belas, E.; Grmela, L., 2018: Determining the sub-surface damage of CdTe single crystals after lapping. JOURNAL OF MATERIALS SCIENCE: MATERIALS IN ELECTRONICS 29(11), p. 9652 - 9662, doi: 10.1007/s10854-018-9002-7
    (RIGAKU9, HELIOS, DEKTAK)
  • Manakhov, A; Landova, M; Medalova, J; Michlicek, M; Polcak, J; Necas, D; Zajickova, L, 2017: Cyclopropylamine plasma polymers for increased cell adhesion and growth. PLASMA PROCESSES AND POLYMERS 14(7), doi: 10.1002/ppap.201600123
    (LYRA, ICON-SPM, DEKTAK)
  • Knotek, M., 2015: Selective growth of GaN nanostructures on silicon substrates. MASTER´S THESIS , p. 1 - 68
    (DEKTAK, LYRA, ICON-SPM, TERS)

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