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Non-silicon MEMS platforms for gas sensors
SENSORS AND ACTUATORS B: CHEMICAL
VASILIEV, A.; PISLIAKOV, A.; SOKOLOV, A.; SAMOTAEV, N.; SOLOVIEV, S.; OBLOV, K.; GUARNIERI, V.; LORENZELLI, L.; BRUNELLI, J.; MAGLIONE, A.; LIPILIN, A.; MOZALEV, A.; LEGIN, A., 2016: Non-silicon MEMS platforms for gas sensors. SENSORS AND ACTUATORS B: CHEMICAL 224, p. 700 - 14, doi: 10.1016/j.snb.2015.10.066; FULL TEXT