Optimization of ion-atomic beam source for deposition of GaN ultrathin films

REVIEW OF SCIENTIFIC INSTRUMENTS

Mach, J; Samoril, T; Kolibal, M; Zlamal, J; Voborny, S; Bartosik, M; Sikola, T, 2014: Optimization of ion-atomic beam source for deposition of GaN ultrathin films. REVIEW OF SCIENTIFIC INSTRUMENTS 85(8), doi: 10.1063/1.4892800

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