PECVD of nanostructured SiO2 in a modulated microwave plasma jet at atmospheric pressure

JOURNAL OF PHYSICS D-APPLIED PHYSICS

Hnilica, J; Schafer, J; Foest, R; Zajickova, L; Kudrle, V, 2013: PECVD of nanostructured SiO2 in a modulated microwave plasma jet at atmospheric pressure. JOURNAL OF PHYSICS D-APPLIED PHYSICS 46(33), p. nestrankovano - , doi: 10.1088/0022-3727/46/33/335202

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