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PRECISE MEASUREMENT OF THICKNESS DISTRIBUTION OF NONUNIFORM THIN FILMS BY IMAGING SPECTROSCOPIC REFLECTOMETRY

XIX IMEKO WORLD CONGRESS: FUNDAMENTAL AND APPLIED METROLOGY, PROCEEDINGS

Ohlidal, M; Ohlidal, I; Klapetek, P; Necas, D, 2009: PRECISE MEASUREMENT OF THICKNESS DISTRIBUTION OF NONUNIFORM THIN FILMS BY IMAGING SPECTROSCOPIC REFLECTOMETRY. XIX IMEKO WORLD CONGRESS: FUNDAMENTAL AND APPLIED METROLOGY, PROCEEDINGS , p. 100 - 105

CEITEC authors:

• David Nečas, Ph.D.
• Petr Klapetek, Ph.D.