The course is intended for teachers at secondary schools and multi-year grammar schools. Capacity is limited to 6 participants at a time, who are accompanied by CEITEC BUT staff while on the premises of CEITEC BUT. During the Theoretical Introduction, participants are first familiarized with the safety rules for working in ISO5 cleanroom laboratories and receive basic information about the instruments they will later use in the laboratory. The introduction also includes a demonstration of the design process for components and structures, which participants will subsequently fabricate in the laboratory. The practical part then involves working with specific instruments in the laboratories, with the goal of exposing a pre-prepared structure into a metallic layer. Participants will get hands-on experience with all the technological steps and will take home a finished sample at the end. In addition to the sample, they will also receive a certificate of course completion.
Safety and Laboratory Work – Design and Its Creation – Lithography – Metallization – Etching
Metal Layer Deposition – Resist Coating of the Substrate – Lithography: Direct Writing or Mask-Based – Structure Etching: Dry and Wet – Metal Layer Lift-off – Microscope Inspection: Optical and SEM
