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PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD
CHEMICKE LISTY
Stoica, A; Mocanu, V; Cupera, J; Kelar, L; Bursikova, V, 2012: PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD. CHEMICKE LISTY 106, p. S1499 - S1503