Resist stripper Diener electronic NANO Plasma cleaner (DIENER)

Description:

Diener NANO Plasma Cleaner with microwave generator can be used for stripping of the resist. Microwave plasma is ideal for most resist removal in modern device fabrication because it produces a very high concentration of chemically active species along with low energy ion bombardment. Therefore, it guarantees fast ash rate and a damage-free plasma cleaning. Microwave plasma systems are suitable for various substrate technologies like Si, III/V-compounds, quartz, ceramic, lithium niobate, copper interconnect devices etc. Oxygen plasma generates oxygen radicals and O2 ions. It is well suited for the removing of photoresist because oxygen radicals fast etch polymers and organics under formation of CO2 and water (ashing). The samples (max. size 8‘‘) can be heated (up to 100 C) by the chuck in order to ease the stripping of the photoresist.
In biomedical applications, plasma cleaning is useful for achieving compatibility between synthetic biomaterials and natural tissues. Surface modification minimizes adverse reactions such as inflammation, infection, and thrombosis formation.

Publications:

• ČERVINKA, O.; WEISS, V.; HRTOŇ, M.; BOUCHAL, P.; LIŠKA, P.; LIGMAJER, F.; ŠIKOLA, T.; VIEWEGH, P., 2026: Establishing a library of metasurface building blocks through coherence-controlled holographic microscopy. JOURNAL OF APPLIED PHYSICS 139(5), doi: 10.1063/5.0303155; FULL TEXT
  (RAITH, EVAPORATOR, ALD-FIJI, SCIA, DIENER)
• FABBRI, L.; MIGLIACCIO, L.; ŠIRVINSKYTĖ, A.; RIZZI, G.; BONDI, L.; TAMAROZZI, C.; WEBER, S.; FRABONI, B.; GLOWACKI, E.; CRAMER, T., 2025: How to Achieve High Spatial Resolution in Organic Optobioelectronic Devices?. ADVANCED MATERIALS INTERFACES 12(9), p. 1 - 9, doi: 10.1002/admi.202400822; FULL TEXT
  (DIENER, LAURELL-NANO)
• HAVLÍKOVÁ, T.; PAPEŽ, N.; FOHLEROVÁ, Z.; KASPAR, P.; DALLAEV, R.; ČÁSTKOVÁ, K.; ŢĂLU, Ş., 2025: Adaptability of Electrospun PVDF Nanofibers in Bone Tissue Engineering. POLYMERS 17(3), doi: 10.3390/polym17030330; FULL TEXT
  (DIENER, LYRA, WITEC-RAMAN, FTIR, SEE-SYSTEM)
• OPANČAR, A.; GLOWACKI, E.; DEREK, V., 2024: . J NEURAL ENG , p. 1 - 17, doi: 10.1088/1741-2552/ad6a8b; FULL TEXT
  (DIENER, KAUFMAN, MAGNETRON)
• JAKEŠOVÁ, M.; KUNOVSKÝ, O.; GABLECH, I.; KHODAGHOLY, D.; GELINAS, J.; GLOWACKI, E., 2024: . JOURNAL OF NEURAL ENGINEERING 21(4), doi: 10.1088/1741-2552/ad593d; FULL TEXT
  (PARYLENE-SCS, MAGNETRON, SUSS-MA8, EVAPORATOR, RIE-FLUORINE, DIENER, WIRE-BONDER)

• Mahel, V., 2023: . MASTER'S THESIS ; FULL TEXT
  (DWL, DRIE, DEKTAK, DIENER, WIRE-BONDER)
• ZANGANA, S.; LEDNICKÝ, T.; BONYÁR, A., 2023: . CHEMOSENSORS 11(4), p. 1 - 14, doi: 10.3390/chemosensors11040235; FULL TEXT
  (VERIOS, HELIOS, RIE-FLUORINE, DIENER)
• ABUDLLAEVA, O.; SAHALIANOV, I.; EJNEBY, M.; JAKEŠOVÁ, M.; ZOZOULENKO, I.; LIIN, S.; GLOWACKI, E., 2022: . ADVANCED SCIENCE , p. 1 - 14, doi: 10.1002/advs.202103132; FULL TEXT
  (DIENER, EVAPORATOR, SUSS-MA8, PARYLENE-SCS, RIE-FLUORINE)
• VAŇATKA, M.; SZULC, K.; WOJEWODA, O.; DUBS, C.; CHUMAK, A.; KRAWCZYK, M.; DOBROVOLSKIY, O.; KLOS, J.; URBÁNEK, M., 2021: . PHYSICAL REVIEW APPLIED 16(5), p. 054033-1 - 10, doi: 10.1103/PhysRevApplied.16.054033; FULL TEXT
  (VNA-MPI, BRILLOUIN, RAITH, EVAPORATOR, MAGNETRON, DIENER, VERIOS, RIE-FLUORINE)
• KAUSHIK, P.; ELIÁŠ, M.; PRÁŠEK, J.; MICHALIČKA, J.; ZAJÍČKOVÁ, L., 2021: . MATERIALS CHEMISTRY AND PHYSICS 271, p. 124901-1 - 11, doi: 10.1016/j.matchemphys.2021.124901; FULL TEXT
  (EVAPORATOR, PECVD-NANOFAB, DIENER, ALD-FIJI, RIGAKU9, VERIOS, TITAN)
• Brodský J., 2021: . MASTER'S THESIS , p. 1 - 84; FULL TEXT
  (DWL, DIENER, SUSS-RCD8, SUSS-MA8, EVAPORATOR, MPS150, WITEC-RAMAN, RIE-FLUORINE, DRIE, LYRA, ICON-SPM)
• BARTOŠÍK, M.; MACH, J.; PIASTEK, J.; NEZVAL, D.; KONEČNÝ, M.; ŠVARC, V.; ENSSLIN, K.; ŠIKOLA, T., 2020: . ACS SENSORS 5(9), p. 2940 - 10, doi: 10.1021/acssensors.0c01441; FULL TEXT
  (EVAPORATOR, DWL, DIENER)
• Chmela, O., 2020: . PH.D THESIS , p. 1 - 199
  (ALD-FIJI, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, NANOCALC, MPS150, WIRE-BONDER, ICON-SPM)
• GABLECH, I.; KLEMPA, J.; PEKÁREK, J.; VYROUBAL, P.; KUNZ, J.; NEUŽIL, P., 2019: . 2019 19TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS) (001), p. 1 - 4, doi: 10.1109/PowerMEMS49317.2019.82063211368; FULL TEXT
  (DIENER, DRIE, DWL, KAUFMAN, RIE-CHLORINE, SUSS-MA8)
• Brodský, J., 2019: . BACHELOR'S THESIS , p. 1 - 50
  (MPS150, WITEC-RAMAN, EVAPORATOR, DRIE, PECVD, DWL, SUSS-MA8, RIE-FLUORINE, RIE-CHLORINE, DIENER, SCIA)
• STARÁ, V.; PROCHÁZKA, P.; MAREČEK, D.; ŠIKOLA, T.; ČECHAL, J., 2018: . NANOSCALE 10(37), p. 17520 - 5, doi: 10.1039/c8nr06483k; FULL TEXT
  (ALD-FIJI, DIENER, DWL, EVAPORATOR)
• SVATOŠ, V.; GABLECH, I.; ILIC, B; PEKÁREK, J.; NEUŽIL, P., 2018: . JOURNAL OF APPLIED PHYSICS 123(11), p. 114503-1 - 8, doi: 10.1063/1.5016465; FULL TEXT
  (EVAPORATOR, DIENER)
• PODEŠVA, P.; GABLECH, I.; NEUŽIL, P., 2018: . ANALYTICAL CHEMISTRY 90(2), p. 1161 - 7, doi: 10.1021/acs.analchem.7b0372; FULL TEXT
  (SUSS-MA8, DWL, SCIA, DIENER)
• Procházka, P., 2018: . PH.D. THESIS , p. 1 - 139
  (ALD-FIJI, DIENER, EVAPORATOR, MIRA-EBL, PECVD, WIRE-BONDER)
• PROCHÁZKA, P.; MAREČEK, D.; LIŠKOVÁ, Z.; ČECHAL, J.; ŠIKOLA, T., 2017: . SCIENTIFIC REPORTS 7, p. 1 - 7, doi: 10.1038/s41598-017-00673-z; FULL TEXT
  (MIRA-EBL, DIENER, ALD-FIJI, WIRE-BONDER)
• MACH, J.; PROCHÁZKA, P.; BARTOŠÍK, M.; NEZVAL, D.; PIASTEK, J.; HULVA, J.; ŠVARC, V.; KONEČNÝ, M.; KORMOŠ, L.; ŠIKOLA, T., 2017: . NANOTECHNOLOGY 28(41), p. 1 - 10, doi: 10.1088/1361-6528/aa86a4; FULL TEXT
  (DIENER, DWL, EVAPORATOR, WIRE-BONDER, LYRA)
• Kormoš, L., 2015: . MASTER'S THESIS , p. 1 - 59
  (DIENER, WIRE-BONDER, LYRA)
• Švarc, V., 2015: . MASTER'S THESIS , p. 1 - 50
  (ALD-FIJI, DIENER, WIRE-BONDER, LYRA)
• Lišková, Z., 2015: . PH.D. THESIS , p. 1 - 106
  (MIRA-EBL, DIENER, NANOCALC, DWL, EVAPORATOR, WIRE-BONDER, ALD-FIJI, LYRA)
• Kvapil, M., 2015: . PH.D. THESIS , p. 1 - 104
  (FTIR, NANOCALC, DIENER, LYRA)

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