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Self-consistent autocorrelation for finite-area bias correction in roughness measurement

ENGINEERING RESEARCH EXPRESS

NEČAS, D., 2024: Self-consistent autocorrelation for finite-area bias correction in roughness measurement. ENGINEERING RESEARCH EXPRESS 6(2), doi: 10.1088/2631-8695/ad5302; FULL TEXT

Research Groups:

• Plasma Technologies
• CF: CEITEC Nano

CEITEC authors:

• David Nečas, Ph.D.